Double-frequency power-driven inductively coupled plasma torch, and apparatus for generating nanoparticle using same
A dual frequency power-driven inductively coupled plasma torch according to an exemplary embodiment of the present invention includes: a hollow confinement tube provided with a space in which thermal plasma is formed; an induction coil that surrounds the confinement tube; and a power supply source that supplies power to the induction coil, wherein the power supply source may supply at least two powers having different frequencies to the induction coil.
1. A dual frequency power-driven inductively coupled plasma torch, comprising:
a hollow confinement tube provided with a space in which thermal plasma is formed;
an induction coil that surrounds the confinement tube; and
a power supply source that supplies power to the induction coil,
wherein the power supply source supplies at least two powers having different frequencies to the induction coil,
wherein the at least two powers includes a first power having a first frequency and a second power having a second frequency higher than the first frequency, and
wherein the first power and the second power are supplied to the induction coil in a simultaneous dual frequency (SDF) manner where the first frequency and the second frequency are combined in a modulated form.
2. The dual frequency power-driven inductively coupled plasma torch of claim 1 , wherein
the at least two powers having different frequencies are implemented by two separate power sources and two inverters.
3. The dual frequency power-driven inductively coupled plasma torch of claim 1 , wherein
the at least two powers having different frequencies are implemented by one power source and two inverters connected in parallel to the one power source.
4. A dual frequency power-driven inductively coupled plasma torch, comprising:
a hollow confinement tube provided with a space in which thermal plasma is formed;
an induction coil that surrounds the confinement tube; and
a power supply source that supplies power to the induction coil,
wherein the power supply source supplies at least two powers having different frequencies to the induction coil,
wherein the at least two powers having different frequencies are time sharing dual frequency powers that are time-shared and alternately supplied to the induction coil.
5. The dual frequency power-driven inductively coupled plasma torch of claim 1 , wherein
a low-frequency power of the at least two powers having different frequencies has a frequency of 0.05-0.5 MHz, and a high-frequency power thereof has a frequency of 1-20 MHz.
6. The dual frequency power-driven inductively coupled plasma torch of claim 1 , further comprising
an injection probe that introduces nano-metal particle precursors into the confinement tube.
7. An apparatus for generating nanoparticles, comprising:
a device that supplies nanoparticle precursors; and
the dual frequency power-driven inductively coupled plasma torch of claim 1 ,
wherein the dual frequency power-driven inductively coupled plasma torch receives and evaporates the nanoparticle precursors from the device to form nanoparticles.
8. The apparatus for generating the nanoparticles of claim 7 , wherein
the nanoparticle precursors are introduced into the confinement tube from the device through an injection probe.
9. The apparatus for generating the nanoparticles of claim 7 , wherein the nanoparticle precursors are one or more materials selected from a metal, a metal oxide, and a ceramic.
10. The dual frequency power-driven inductively coupled plasma torch of claim 4 , wherein
a low-frequency power of the at least two powers having different frequencies has a frequency of 0.05-0.5 MHz, and a high-frequency power thereof has a frequency of 1-20 MHz.
11. The dual frequency power-driven inductively coupled plasma torch of claim 4 , further comprising
an injection probe that introduces nano-metal particle precursors into the confinement tube.
12. An apparatus for generating nanoparticles, comprising:
a device that supplies nanoparticle precursors; and
the dual frequency power-driven inductively coupled plasma torch of claim 4 ,
wherein the dual frequency power-driven inductively coupled plasma torch receives and evaporates the nanoparticle precursors from the device to form nanoparticles.
13. The apparatus for generating the nanoparticles of claim 12 , wherein
the nanoparticle precursors are introduced into the confinement tube from the device through an injection probe.
14. The apparatus for generating the nanoparticles of claim 12 , wherein
the nanoparticle precursors are one or more materials selected from a metal, a metal oxide, and a ceramic.