IP Library › Granted Patent US 10,680,131
Granted Patent B2
US 10,680,131 · App. 15/747,760 · Granted Jun 9, 2020

Doped absorption devices

Inventors: Zhihong Huang (Palo Alto, CA); Raymond G Beausoleil (Seattle, WA)
Assignee: Hewlett Packard Enterprise Development LP
H01L31/109G02B6/12G02B6/12004H01L31/028H01L31/02327H01L31/105H01L31/1075H01L31/1804G02B2006/12061G02B2006/12123
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Quick Facts
Patent No.
US 10,680,131
App. No.
15/747,760
Granted
Jun 9, 2020
Kind
B2
Abstract

An example device includes a doped absorption region to receive optical energy and generate free electrons from the received optical energy. The example device also includes a doped charge region to increase an electric field. The example device also includes an intrinsic multiplication region to generate additional free electrons from impact ionization of the generated free electrons. The example device includes a doped contact region to conduct the free electrons and the additional free electrons.

Claims (17)

1. A device, comprising:

a doped absorption region to receive optical energy and generate free electrons from the received optical energy;

a doped charge region to increase an electric field;

an intrinsic multiplication region to generate additional free electrons from impact ionization of the generated free electrons;

a doped contact region to conduct the free electrons and the additional free electrons, the doped contact region disposed below the intrinsic multiplication region; and

a silicon waveguide in direct contact with the doped contact region on a first side and the intrinsic multiplication region on a second side, the first side being perpendicular to the second side.

2. The device of claim 1 , further comprising a buffer region in direct contact with the doped absorption region and the doped charge region, wherein the buffer region is to impede a strong electric field from extending into the doped absorption region.

3. The device of claim 2 , wherein the buffer region has a p-type doping concentration between about 1×10 15 atoms/cm 3 and about 5×10 17 atoms/cm 3 , and wherein the buffer region comprises at least one of silicon and germanium.

4. The device of claim 1 , wherein the doped absorption region includes a p-type doping concentration between about 5×10 18 atoms/cm 3 and about 5×10 19 atoms/cm 3 , and wherein the doped absorption region comprises germanium.

5. The device of claim 1 , wherein the intrinsic multiplication region comprises silicon.

6. The device of claim 1 , wherein the received optical energy is transferred evanescently from the silicon waveguide to the doped absorption region, the optical energy received by the waveguide through a grating coupler coupled to an optical fiber and configured to direct the optical energy into the silicon waveguide.

7. The device of claim 1 , wherein the doped contact region comprises an n-type silicon layer formed on a silicon dioxide buried oxide layer.

8. The device of claim 7 , wherein the doped contact region includes an n-type doping concentration of at least about 1×10 20 atoms/cm 3 .

9. The device of claim 7 , wherein the doped contact region comprises a thickness between about 200 nm and about 2 μm.

10. The device of claim 1 , wherein the doped charge region comprises a moderately doped p-type silicon layer.

11. The device of claim 10 , wherein the doped charge region includes a p-type doping concentration between about 2×10 17 atoms/cm 3 and about 2×10 18 atoms/cm 3 .

12. The device of claim 11 , wherein the doped charge region comprises a thickness between about 20 nm and about 100 nm.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2018
From: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
To: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP
Reel/Frame 045435/0433 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 26, 2018
From: HUANG, ZHIHONG; BEAUSOLEIL, RAYMOND G
To: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Reel/Frame 045351/0752 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 26, 2018
From: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
To: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP
Reel/Frame 045722/0001 →
Continuity (1)
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