X-ray microscope
An X-ray microscope includes at least one of an X-ray source, a sample holding part, a concave Kirkpatrick-Baez mirror, a convex Kirkpatrick-Baez mirror, and a light receiving part located at a position in an imaging relation to a position of the sample holding part in this order along an optical axis.
1. An X-ray microscope comprising:
an X-ray source;
a sample holding part;
a concave KB mirror which is a Kirkpatrick-Baez mirror having a reflection concave surface, and is a one-dimensional condensing mirror having curvature only in one direction;
a convex KB mirror which is a Kirkpatrick-Baez mirror having a reflection convex surface, and is a one-dimensional condensing mirror having curvature only in one direction; and
a light receiving part located at a position in an imaging relation to a position of the sample holding part in this order,
wherein the reflection concave surface of the concave KB mirror includes an elliptical curve.
2. The X-ray microscope according to claim 1 , wherein
the sample holding part is located at a focal position of the elliptical curve.
3. The X-ray microscope according to claim 1 , wherein:
the reflection convex surface of the convex KB mirror includes one curved line of a hyperbolic curve that is composed of the one curved line and another curved line; and
the light receiving part is located at a focal position of the other curved line side of focal positions of the hyperbolic curve.
4. The X-ray microscope according to claim 1 , wherein
a distance between the concave KB mirror and the light receiving part is longer than a distance between the convex KB mirror and the light receiving part.
5. The X-ray microscope according to claim 1 , wherein
a principal plane of an imaging system including the convex KB mirror and the concave KB mirror is located between the sample holding part and the concave KB mirror.
6. The X-ray microscope according to claim 1 , wherein
a distance between the position of the sample holding part and the position of the light receiving part is 2.5 m or less.
7. The X-ray microscope according to claim 1 , wherein:
the convex KB mirror is one of at least two convex KB mirrors;
the concave KB mirror is one of at least two concave KB mirrors;
a normal of a first of the at least two convex KB mirrors and a normal of a second of the at least two convex KB mirrors are nonparallel to each other; and
a normal of a first of the at least two concave KB mirrors and a normal of a second of the at least two concave KB mirrors are nonparallel to each other.
8. The X-ray microscope according to claim 1 , wherein
a shortest distance between the sample holding part and the concave KB mirror is 6 mm or more.
9. The X-ray microscope according to claim 1 , wherein
at least one of the convex KB mirror and the concave KB mirror is movable in an optical axis direction.
10. The X-ray microscope according to claim 1 , wherein:
the concave KB mirror is a first concave KB mirror;
a second concave KB mirror and a third concave KB mirror are between the sample holding part and the first concave KB mirror;
a normal of the first concave KB mirror and a normal of the second concave KB mirror are nonparallel to each other; and
a normal of the convex KB mirror and a normal of the third concave KB mirror are nonparallel to each other.
11. The X-ray microscope according to claim 10 , wherein:
the second concave KB mirror is closer to the sample holding part than the third concave KB mirror;
a reflection concave surface of the second concave KB mirror includes a hyperbolic curve; and
a reflection concave surface of the third concave KB mirror includes an elliptical curve.
12. The X-ray microscope according to claim 1 , wherein
the X-ray source is configured to emit an X-ray having energy of 2 keV or higher.
13. The X-ray microscope according to claim 1 , wherein
the concave KB mirror and the convex KB mirror are grazing incidence X-ray mirrors.