Metal contamination inhibitor, metal contamination inhibition membrane, method for preventing metal contamination, and method for cleaning product
The present invention reduces adhesion of trace metals in ultrapure water for cleaning products, and inhibits the metal contamination of an object to be cleaned. Provided is a metal contamination inhibitor that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a molecular weight of at least 100,000. Trace metals in ultrapure water are adsorbed through an ion-exchange reaction of the polymer having the ion-exchange group, and can thus be inhibited from adhering to products. Also provided is a method for cleaning a product with ultrapure water to which the metal contamination inhibitor has been added. Preferably, the ultrapure water to which the metal contamination inhibitor has been added flows through a separation membrane module, and the products are cleaned with permeated water.
1. A method for preventing metal contamination of a product by trace metals contained in ultrapure water, the method comprising:
adding a metal contamination inhibitor comprising a polymer including either a polystyrene sulfonic acid or a quaternary ammonium group to the ultrapure water, the polymer having an ion-exchange group and a molecular weight of 100,000 or more, wherein an amount of the metal contamination inhibitor added to the ultrapure water is 1 to 20 times of an ion exchange reaction equivalent ratio between the polymer having the ion-exchange group and the trace metals contained in the ultrapure water,
subsequent to adding the metal contamination inhibitor to the ultrapure water, removing metal contamination inhibitor with adsorbed trace metals from the ultrapure water by passing the ultrapure water through a module including a separation membrane, and
washing the product with the ultrapure water that was passed through the separation membrane.
2. The method for preventing metal contamination according to claim 1 , wherein the trace metals have a valence of two or more.
3. A method for cleaning a product with ultrapure water, comprising:
adding a metal contamination inhibitor comprising a polymer including either a polystyrene sulfonic acid or a quaternary ammonium group to ultrapure water containing trace metals, the polymer having an ion-exchange group and a molecular weight of 100,000 or more, wherein an amount of the metal contamination inhibitor added to the ultrapure water containing trace metals is 1 to 20 times of an ion exchange reaction equivalent ratio between the polymer having the ion-exchange group and the trace metals contained in the ultrapure water,
subsequent to adding the metal contamination inhibitor to the ultrapure water, removing metal contamination inhibitor with adsorbed trace metals from the ultrapure water by passing the ultrapure water through a module including a separation membrane, and
cleaning the product with the ultrapure water passed through the separation membrane.
4. The method for cleaning a product according to claim 3 , wherein the trace metals have a valence of two or more.