Cerium-based abrasive material and process for producing same
A cerium-based abrasive that achieves a high polishing rate and suppresses the occurrence of surface defects such as scratches and pits and the deposition of the abrasive particles on the polished surface in surface polishing of glass substrates or the like, at low cost with a high production efficiency. The cerium-based abrasive includes a cubic composite rare earth oxide and a composite rare earth oxyfluoride, containing 95.0 to 99.5 mass % of total rare earth elements in terms of oxides, containing 54.5 to 95.0 mass % of cerium in terms of oxide, 4.5 to 45.0 mass % of lanthanum in terms of oxide, and 0.5 to 2.0 mass % of neodymium in terms of oxide relative to the total rare earth elements in terms of oxides, containing 0.5 to 4.0 mass % of fluorine atoms, and containing 0.001 to 0.50 mass % of sodium atoms relative to the total rare earth elements in terms of oxides.
1. A cerium-based abrasive comprising a cubic composite rare earth oxide and a composite rare earth oxyfluoride,
containing 95.0 to 99.5 mass % of total rare earth elements in terms of oxides,
containing 54.5 to 95.0 mass % of cerium in terms of oxide, 4.5 to 45.0 mass % of lanthanum in terms of oxide, and 0.5 to 1.0 mass % of neodymium in terms of oxide relative to the total rare earth elements in terms of oxides,
containing 0.5 to 4.0 mass % of fluorine atoms, and
containing 0.005 to 0.30 mass % of sodium atoms relative to the total rare earth elements in terms of oxides.
2. The cerium-based abrasive according to claim 1 , wherein the intensity ratio of the main peak of the rare earth oxyfluoride to the main peak of the cubic composite rare earth oxide in the X-ray diffraction measurement using Cu Kα radiation is 0.01 to 0.50.
3. A method for manufacturing the cerium-based abrasive according to claim 1 , comprising the steps of:
firing mixed light rare earth compounds containing cerium, lanthanum and neodymium at 500 to 1100° C. to obtain mixed rare earth oxides,
adding rare earth fluorides containing cerium, lanthanum and neodymium to the mixed rare earth oxides, and
pulverizing and firing a resultant mixture,
wherein a sodium compound is added prior to the firing.
4. The method according to claim 3 , wherein the rare earth fluorides are obtained by adding fluorides to the mixed light rare earth compounds and heat-treating the mixture at 400° C. or lower.
5. The method according to claim 3 , wherein the mixing mass ratio of the mixed rare earth oxides to the rare earth fluorides to be added is 99:1 to 65:35.
6. The method according to claim 3 , wherein the sodium compound is at least one sodium salt selected from the group consisting of sodium hydrogen carbonate, sodium carbonate, sodium acetate, sodium phosphate, sodium sulfate, sodium nitrate, sodium oxalate and sodium polyacrylate.