Metrology devices for rapid specimen setup
View Patent ↗An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.
1. A metrology device, comprising:
a first stage comprising a microelectromechanical (MEMS) device having a probe;
a second stage configured to hold a sample; and
a kinematic coupler for constraining the first stage in six degrees of freedom and in a fixed position relative to the second stage, wherein the probe of the MEMS device is precisely aligned with a feature of interest of the sample when the first stage is constrained in the fixed position relative to the second stage, and wherein the first stage is arranged on the second stage.
2. The metrology device of claim 1 , wherein the kinematic coupler comprises a plurality of fasteners coupled to the first stage and a plurality of grooves arranged on the second stage.
3. The metrology device of claim 2 , wherein each of the fasteners is configured to interface with one of the grooves to constrain the first stage in the fixed position relative to the second stage.
4. The metrology device of claim 2 , wherein each of the fasteners comprises a ball configured to interface with one of the grooves to constrain the first stage in the fixed position relative to the second stage.
5. The metrology device of claim 2 , wherein each of the grooves is a vee-block.
6. The metrology device of claim 1 , further comprising a micrometer.
7. The metrology device of claim 6 , wherein the micrometer is further configured to adjust the fixed position of the first stage relative to the second stage.
8. The metrology device of claim 1 , wherein the first stage further comprises a flexure element coupled to the MEMS device, and wherein the flexure element is configured to displace the MEMS device in at least one direction.
9. The metrology device of claim 8 , wherein the flexure element is a flexure bearing.
10. The metrology device of claim 8 , wherein the first stage defines an opening, and wherein the MEMS device is arranged in the opening.
11. The metrology device of claim 8 , wherein the flexure element is configured to displace the MEMS device with millimeter (mm)-scale range.
12. The metrology device of claim 8 , wherein the flexure element is configured to displace the MEMS device with sub-micron (μm) precision.
13. The metrology device of claim 8 , wherein the flexure element is configured to displace the MEMS device in at least two directions.
14. The metrology device of claim 13 , wherein the flexure element is a double parallelogram flexure element.
15. The metrology device of claim 8 , wherein the first stage defines a two-dimensional plane, and wherein the at least one direction is within the two-dimensional plane.
16. The metrology device of claim 1 , wherein the first stage comprises a plurality of MEMS devices.
17. The metrology device of claim 16 , wherein the first stage comprises a plurality of flexure elements, and wherein each of the flexure elements is coupled to a respective MEMS device.
18. The metrology device of claim 1 , wherein the MEMS device is an atomic force microscopy (AFM) chip or a scanning probe microscopy (SPM) chip.
19. The metrology device of claim 1 , wherein the sample is a semiconductor wafer.
20. The metrology device of claim 1 , wherein the kinematic coupler comprises a first portion attached to the first stage and a second portion attached to the second stage.
21. The metrology device of claim 1 , wherein the kinematic coupler is configured to repeatably constrain the first stage in the fixed position relative to the second stage.