Photoelectric conversion element, Method of manufacturing the same, solid state image sensor, electronic device, and solar cell
The present technology relates to, in a photoelectric conversion element using a photoelectric conversion film, the photoelectric conversion element and a method of manufacturing the same, a solid state image sensor, an electronic device, and a solar cell, for enabling improvement of quantum efficiency. The photoelectric conversion element includes two electrodes constituting an anode and a cathode, and a photoelectric conversion layer arranged between the two electrodes, and at least one electrode side of the two electrodes is doped with an impurity at impurity density of 1e16/cm3 or more in the photoelectric conversion layer. The present technology can be applied to, for example, a solid state image sensor, an electronic device, a solar cell and the like.
1. A photoelectric conversion element, comprising:
an anode;
a cathode;
a first photoelectric conversion layer;
a second photoelectric conversion layer different from the first photoelectric conversion layer; and
a third photoelectric conversion layer different from the first photoelectric conversion layer and the second photoelectric conversion layer, wherein
each of the first photoelectric conversion layer, the second photoelectric conversion layer, and the third photoelectric conversion layer is between the anode and the cathode,
each of the second photoelectric conversion layer and the third photoelectric conversion layer is in contact with the first photoelectric conversion layer,
a first electrode side of the second photoelectric conversion layer is doped with an electron accepting impurity at an impurity density of at least 1e16/cm3, and
a second electrode side of the third photoelectric conversion layer is doped with an electron donating impurity.
2. The photoelectric conversion element according to claim 1 , wherein
the first electrode side corresponds to a side of the cathode.
3. The photoelectric conversion element according to claim 1 , wherein
the first electrode side corresponds to a side of the anode.
4. The photoelectric conversion element according to claim 1 , wherein
the first electrode side corresponds to a side of the cathode, and
the second electrode side corresponds to a side of the anode.
5. The photoelectric conversion element according to claim 1 , further comprising a hole blocking layer between the anode and the second photoelectric conversion layer.
6. The photoelectric conversion element according to claim 1 , further comprising an electron blocking layer between the cathode and the second photoelectric conversion layer.
7. The photoelectric conversion element according to claim 1 , wherein the impurity density is at least 1e17/cm3.
8. The photoelectric conversion element according to claim 7 , wherein the impurity density is at least 1e18/cm3.
9. The photoelectric conversion element according to claim 5 , wherein a thickness of the hole blocking layer is between 10 nm and 200 nm.
10. The photoelectric conversion element according to claim 6 , wherein a thickness of the electron blocking layer is between 10 nm and 200 nm.
11. The photoelectric conversion element according to claim 1 , wherein
a thickness of the second photoelectric conversion layer is less than a thickness of the first photoelectric conversion layer, and
a thickness of the third photoelectric conversion layer is less than the thickness of the first photoelectric conversion layer.