IP Library Granted Patent US 10,665,797
Granted Patent B2
US 10,665,797 · App. 15/774,944 · Granted May 26, 2020

Hybrid halide perovskite-based field effect transistors

Inventors: Yaochuan Mei (Winston-Salem, NC); Oana Diana Jurchescu (Winston-Salem, NC); Zeev Valentine Vardeny (Salt Lake City, UT); Chuang Zhang (Salt Lake City, UT)
Assignees: WAKE FOREST UNIVERSITY; UNIVERSITY OF UTAH RESEARCH FOUNDATION
H01L51/0566H01L51/052H01L51/0558H01L51/105H01L51/004H01L51/005H01L51/0077H01L51/0541H01L51/0545
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Quick Facts
Patent No.
US 10,665,797
App. No.
15/774,944
Granted
May 26, 2020
Kind
B2
Abstract

In one aspect, field effect transistors are described herein employing channels formed of hybrid halide perovskite materials. For example, a field effect transistor comprises a source terminal, a drain terminal and a gate terminal wherein a dielectric layer is positioned between the gate terminal and the source and drain terminals. A channel layer is in electrical communication with the source terminal and the drain terminal, the channel layer comprising an organic-inorganic perovskite in contact with a polymeric surface of the dielectric layer.

Claims (40)

1. A field effect transistor comprising:

a source terminal, a drain terminal and a gate terminal;

a dielectric layer positioned between the gate terminal and the source and drain terminals; and

a channel layer in electrical communication with the source terminal and drain terminal, the channel layer comprising an organic-inorganic perovskite in contact with a polymeric surface of the dielectric layer, wherein the polymeric surface of the dielectric layer comprises amorphous polymer.

2. The field effect transistor of claim 1 , wherein the organic-inorganic perovskite is an organic-inorganic halide perovskite.

3. The field effect transistor of claim 2 , wherein the organic-inorganic halide perovskite has a mixed halide composition.

4. The field effect transistor of claim 2 , wherein the organic-inorganic halide perovskite is of formula ABX 1-z Y z , wherein A is an organic cation, B is an element selected from the group consisting of transition metals, Group IVA elements and rare earth elements and X and Y are independently selected from Group VIIA elements, wherein 0≤z<1.

5. The field effect transistor of claim 4 , wherein the organic-inorganic halide perovskite is of formula APbI 1-z Cl z .

6. The field effect transistor of claim 5 , wherein A is selected form the group consisting of NH 4 + , CH 3 NH 3 + , CH 3 CH 2 NH 3 + and NH 2 CH═NH 2 + .

7. The field effect transistor of claim 1 , wherein the organic-inorganic perovskite is two-dimensional.

8. The field effect transistor of claim 1 , wherein hole mobility (μ h ) or electron mobility (μ e ) increases with decreasing temperature of the channel layer.

9. The field effect transistor of claim 1 , wherein μ e is 10 cm 2 /Vs to 200 cm 2 /Vs.

10. The field effect transistor of claim 9 having threshold voltage (V T ) of 5V to 15V.

11. The field effect transistor of claim 1 , wherein μ h is 10 cm 2 /Vs to 200 cm 2 /Vs.

12. The field effect transistor of claim 11 having V T of −5V to −15V.

13. The field effect transistor of claim 1 having μ e and μ h of at least 1 cm 2 /Vs.

14. The field effect transistor of claim 1 having a channel width of 200 μm to 1000 μm.

15. The field effect transistor of claim 1 having a channel length of 5 μm to 100 μm.

16. The field effect transistor of claim 1 , wherein the channel layer has thickness 200 nm to 500 nm.

17. The field effect transistor of claim 1 , wherein the organic-inorganic perovskite has grain size of at least 200 nm.

18. The field effect transistor of claim 1 , wherein the organic-inorganic perovskite has grain size of 200 nm to 2 μm.

19. The field effect transistor of claim 1 , wherein the organic-inorganic perovskite has surface roughness of 70 nm or less.

20. The field effect transistor of claim 1 , wherein the amorphous polymer is fluoropolymer.

21. The field effect transistor of claim 1 , wherein the polymeric surface of the dielectric layer comprises polymer electret.

22. The field effect transistor of claim 1 , wherein the dielectric layer comprises two or more polymeric layers.

23. The field effect transistor of claim 22 , wherein the dielectric layer exhibits a dielectric gradient.

24. The field effect transistor of claim 23 , wherein a polymer electret layer contacts the organic-inorganic perovskite of the channel layer.

25. The field effect transistor of claim 1 further comprising a work function alteration layer positioned between the channel layer and at least one of the source terminal and drain terminal.

26. A field effect transistor comprising:

a source terminal, a drain terminal and a gate terminal;

a dielectric layer positioned between the gate terminal and the source and drain terminals;

a channel layer in electrical communication with the source terminal and drain terminal, the channel layer comprising an organic-inorganic perovskite in contact with a polymeric surface of the dielectric layer; and

a work function alteration layer positioned between the channel layer and at least one of the source terminal and drain terminal, wherein the work function alteration layer comprises a self-assembled monolayer of a fluorinated compound.

27. The field effect transistor of claim 26 , wherein the fluorinated compound is a fluorinated thiol.

28. The field effect transistor of claim 27 , wherein the fluorinated thiol is 2,3,5,6-tetrafluoro-4-(trifluoromethyl)benzenethiol.

29. A field effect transistor comprising:

a source terminal, a drain terminal and a gate terminal;

a dielectric layer positioned between the gate terminal and the source and drain terminals; and

a channel layer in electrical communication with the source terminal and drain terminal, the channel layer comprising an organic-inorganic perovskite in contact with a polymeric surface of the dielectric layer,

wherein the field effect transistor exhibits electron mobility (μ e ) of 10-200 cm 2 /Vs and a subthreshold swing (S) of less than about 1 V/dec for holes and electrons.

Assignments (5)
CONFIRMATORY LICENSE Recorded Aug 3, 2020
From: UTAH, UNIVERSITY OF
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 053533/0641 →
CONFIRMATORY LICENSE Recorded Jul 13, 2020
From: UTAH, UNIVERSITY OF
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 053533/0947 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 11, 2020
From: MEI, YAOCHUAN; JURCHESCU, OANA DIANA
To: WAKE FOREST UNIVERSITY
Reel/Frame 052087/0171 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 11, 2020
From: VARDENY, ZEEV VALENTINE; ZHANG, CHUANG
To: UNIVERSITY OF UTAH RESEARCH FOUNDATION
Reel/Frame 052087/0433 →
CONFIRMATORY LICENSE Recorded Jan 21, 2020
From: UTAH, UNIVERSITY OF
To: NAVY, SECRETARY OF THE UNITED STATES OF AMERICA
Reel/Frame 052371/0763 →
Continuity (2)
Provisional Application 62252871 · Nov 9, 2015
Related Publication 20180351121A1 · Dec 6, 2018