Apparatus and method for leak testing

1. A leak testing apparatus for detecting leakage of a test object, comprising:

a leak detection path including a test path to be connected to the test object, wherein a test pressure is to be provided to the test object through the test path;

a leak device disposed on the leak detection path, the leak device generating a regular leakage (referred to as a “regular leak value” hereinafter) under predetermined temperature and pressure (referred to as “regular conditions” hereinafter);

a leak measuring instrument disposed on the leak detection path; and

a processor,

wherein the processor performs:

a device actual measurement operation, wherein the leakage measuring instrument measures leakage of the leak device (referred to as “device actual measurement leak value” hereinafter);

an object actual measurement operation, wherein the leakage measuring instrument measures leakage of the test object (referred to as “object actual measurement leak value” hereinafter); and

a judgment operation, the processor converting the object actual measurement leak value into a regular-conditions-converted leak value under the regular conditions based on the device actual measurement leak value and making a leak judgment based on the regular-conditions-converted leak value;

wherein the leak testing apparatus further comprising:

a test pressure measuring instrument for measuring the test pressure;

an external pressure measuring instrument for measuring an external pressure of the leak device or the test object; and

a temperature measuring instrument for measuring ambient temperature of the leak device or the test object, wherein the processor calculates a conversion factor for converting the object actual measurement leak value into the regular-conditions-converted leak value based on values measured by the test pressure measuring instrument, the external pressure measuring instrument and the temperature measuring instrument during the object actual measurement operation, a reference leak hole size factor and the regular leak value, the reference leak hole size factor determined by a size of a reference leak hole of the leak device.

2. A method for leak testing for testing leakage of a test object, comprising steps of:

actually measuring a leak value of a leak device (device actual measurement leak value) with the leak device made communicable with a leak detection path through which a test pressure is supplied, the leak device generating a regular leakage (referred to as a “regular leak value” hereinafter) under predetermined temperature and pressure (referred to as “regular conditions” hereinafter) (device actual measurement step);

actually measuring a leak value of the test object (object actual measurement leak value) with the test object connected to the leak detection path (object actual measurement step); and

judging a leak based on a regular-conditions-converted leak value under the regular conditions, wherein the object actual measurement leak value is converted into the regular-conditions-converted leak value based on the device actual measurement leak value wherein:

a plurality of test objects is sequentially subjected to the leak judgment, and

the device actual measurement leak value is updated by performing the device actual measurement step anew when an actual measurement leak value of a posterior test object judged to be acceptable is increased or decreased by more than a predetermined percentage with respect to an actual measurement leak value of a prior test object judged to be acceptable.

3. The method for leak testing according to claim 2 , wherein:

a conversion factor is calculated based on the regular leak value and the device actual measurement leak value, and

the object actual measurement leak value is converted into the regular-conditions-converted leak value based on the conversion factor.