IP Library Granted Patent US 10,793,962
Granted Patent B2
US 10,793,962 · App. 15/779,641 · Granted Oct 6, 2020

Aqueous indium or indium alloy plating bath and process for deposition of indium or an indium alloy

Inventors: Jan Sperling (Berlin, DE); Stefan Pieper (Berlin, DE); Grigory Vazhenin (Berlin, DE); Mauro Castellani (Berlin, DE); Andreas Kirbs (Berlin, DE); Dirk Rohde (Berlin, DE)
Assignee: Atotech Deutschland GmbH
C25D5/12C25D3/38C25D3/54C25D3/56C25D5/10C25D5/18C25D5/40C25D5/48C25D5/505
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Quick Facts
Patent No.
US 10,793,962
App. No.
15/779,641
Granted
Oct 6, 2020
Kind
B2
Abstract

An aqueous indium or indium alloy plating bath comprising a source of indium ions, an acid, a source of halide ions, a surfactant according to formula (I) wherein A is selected from branched or unbranched C 10 -C 15 -alkyl; B is selected from the group consisting of hydrogen and alkyl; m is an integer ranging from 5 to 25; each R is independently from each other selected from hydrogen and methyl; and a dihydroxybenzene derivative according to formula (II) wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro; n is an integer ranging from 1 to 4, and a process for deposition of indium or an indium alloy wherein the disclosed bath is used.

Claims (33)

1. A process for deposition of indium or an indium alloy comprising the steps of:

i. providing a substrate ( 100 ) having at least one metal or metal alloy surface;

ii. contacting the at least one surface of said substrate ( 100 ) with an aqueous indium or indium alloy plating bath comprising:

a source of indium ions,

an acid,

a source of halide ions,

a surfactant according to formula (I)

wherein A is selected from branched or unbranched C 10 -C 15 -alkyl;

B is selected from the group consisting of hydrogen and alkyl;

m is an integer ranging from 5 to 25;

each R is independently from each other selected from hydrogen and methyl; and

a dihydroxybenzene derivative according to formula (II)

wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro;

n is an integer ranging from 1 to 4,

wherein, when the aqueous indium or indium alloy plating bath is an indium alloy plating bath, an alloying reducible metal is selected from the group consisting of aluminum, bismuth, copper, gold, lead, nickel, silver, tin, tungsten and zinc;

and thereby depositing an indium layer or indium alloy layer on at least a portion of the at least one surface, and

wherein

in step ii. the indium or indium alloy layer is a first indium or indium alloy layer ( 101 ),

in step ii. a composed phase ( 102 ) is formed, made of the metal or metal alloy of said surface ( 100 a ) and at least a part of the first indium or indium alloy layer ( 101 ),

wherein the process further comprises the steps:

iii. removing partially or wholly the part of the first indium or indium alloy layer which has not been converted into the composed phase ( 103 ); and

iv. depositing a second indium or indium alloy layer ( 104 ) on at least a portion of the surface obtained in step iii ( 102 a ).

2. The process according to claim 1 , wherein depositing the indium layer or indium alloy layer in step ii. is carried out by electrolytic deposition.

3. The process according to claim 2 , wherein the electrolytic deposition is a potentiostatic deposition process.

4. The process according claim 1 , wherein depositing the second indium layer or indium alloy layer ( 104 ) in step iv. is carried out by electrolytic deposition and the electrolytic deposition is a potentiostatic deposition process.

5. The process according claim 1 , wherein step iii. is carried out by a electrolytic stripping process and the electrolytic stripping process is a potentiostatic stripping process.

6. The process according to claim 1 , wherein each R is selected from hydrogen and methyl such that hydrogen and methyl are present in a ratio of hydrogen/methyl of 10/1 to 100/1.

7. The process according to claim 1 , wherein R is hydrogen.

8. The process according to claim 1 , wherein the acid is selected from one or more of alkane sulfonic acid and sulfuric acid.

9. The process according to claim 1 , wherein the surfactant has a value for hydrophilic-lipophilic balance (HLB value, determined according to method of Griffin) ranging from 13.0-18.0.

10. The process according to claim 1 , wherein the dihydroxybenzene derivative is 4-chloro resorcinol, 5-methoxy resorcinol, chloro hydroquinone, 4-bromo resorcinol, 2-nitro resorcinol or 4-chloro catechol.

11. The process according to claim 1 , wherein the aqueous indium or indium alloy plating bath has a pH of −1 to 4.

12. The process according to claim 1 , wherein the aqueous indium or indium alloy plating bath further comprises a source of alkali metal cations and/or a source of alkaline earth metal cations.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Aug 18, 2022
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ATOTECH DEUTSCHLAND GMBH & CO. KG (F/K/A ATOTECH DEUTSCHLAND GMBH); ATOTECH USA, LLC
Reel/Frame 061521/0103 →
SECURITY INTEREST Recorded Mar 18, 2021
From: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA, LLC
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 055650/0093 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 29, 2018
From: SPERLING, JAN; PIEPER, STEFAN; VAZHENIN, GRIGORY; CASTELLANI, MAURO; KIRBS, ANDREAS; ROHDE, DIRK
To: ATOTECH DEUTSCHLAND GMBH
Reel/Frame 046248/0521 →