Electronic power module
An electronic power module, including at least one semiconductor component, which is arranged on a support, as well as a cooling element, which is in thermal contact with the semiconductor component, wherein the support includes a semiconductor material and, at the same time, serves as a cooling element.
1. An electronic power module, comprising:
at least one semiconductor component, which is arranged on a support which is in thermal contact with the semiconductor component as a cooling element, wherein the support comprises a semiconductor material and, at the same time, serves as the cooling element, the support further comprising at least one conductive structure that is formed on the support itself by doping and is contacted with the at least one semiconductor component,
wherein at least one insulating layer which is an oxide layer is applied onto the support, and the at least one conductive structure with which the at least one semiconductor component is contacted is applied onto the at least one insulating layer,
wherein the at least one insulating layer is a SiO 2 layer which is produced directly on the support,
wherein the at least one insulating layer is applied onto a predetermined area of the support by a local depositing,
wherein at least one additional electronic component is formed, by doping, directly on the support other than the predetermined area of the support,
wherein the at least one additional electronic component includes a temperature sensor to measure a temperature of the support,
wherein the predetermined area of the support for the at least one insulating layer includes a first region and a second region, and the at least one additional electronic component is provided between the first region and the second region,
wherein the at least one insulating layer is provided onto an upper surface of the support, projecting ribs are provided onto a bottom surface of the support for the cooling element, and no conductive structure is provided in the support between the at least one insulating layer and the projecting ribs.
2. The electronic power module according to claim 1 , wherein the semiconductor material is silicon.
3. The electronic power module according to claim 1 , wherein a plurality of semiconductor components is contacted with the at least one conductive structure.
4. The electronic power module according to claim 1 , wherein the support is structured on the surface of the back side to form a cooling structure.
5. The electronic power module according to claim 4 , wherein the cooling structure is produced in the form of crosspieces or ribs.
6. The electronic power module according to claim 1 , wherein the at least one semiconductor component and at least one terminal are separately contacted with the at least one conductive structure.
7. The electronic power module according to claim 1 , wherein the at least one additional electronic component further includes a current sensor to measure a current of the support, and the current sensor is formed, by doping, directly on the support.