IP Library Granted Patent US 10,396,003
Granted Patent B2
US 10,396,003 · App. 15/787,321 · Granted Aug 27, 2019

Stress tuned stiffeners for micro electronics package warpage control

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Quick Facts
Patent No.
US 10,396,003
App. No.
15/787,321
Granted
Aug 27, 2019
Kind
B2
Abstract

A semiconductor device assembly including a substrate, a semiconductor device, a stiffener member, and mold compound. The stiffener member is tuned, or configured, to reduce and/or control the shape of warpage of the semiconductor device assembly at an elevated temperature. The stiffener member may be placed on the substrate, on the semiconductor device, and/or on the mold compound. A plurality of stiffener members may be used. The stiffener members may be positioned in a predetermined pattern on a component of the semiconductor device assembly. A stiffener member may be used so that the warpage of a first semiconductor device substantially corresponds to the warpage of a second semiconductor device at an elevated temperature. The stiffener member may be tuned by providing the member with a desired coefficient of thermal expansion (CTE). The desired CTE may be based on the individual CTEs of the components of a semiconductor device assembly.

Claims (11)

1. A method of forming a semiconductor device assembly, the method comprising:

determining a first warpage of a first semiconductor device assembly comprised of a semiconductor device, a substrate, and a mold compound;

tuning a stiffener member based on the first warpage in order to form a second semiconductor device assembly having a second warpage, the second semiconductor device assembly comprised of the semiconductor device, the substrate, the mold compound, and the stiffener member;

forming the second semiconductor device assembly comprised of the semiconductor device positioned on the substrate, the mold compound encapsulating at least the semiconductor device, and the stiffener member;

wherein tuning the stiffener member further comprises configuring the stiffener member to have a desired coefficient of thermal expansion; and

wherein tuning the stiffener member further comprises varying a density of the stiffener member to obtain the desired coefficient of thermal expansion.

2. The method of claim 1 , wherein the second warpage substantially corresponds to a third warpage of a second semiconductor device or a third semiconductor device assembly.

3. The method of claim 1 , wherein turning the stiffener member further comprises positioning a plurality of stiffener members within the second semiconductor device assembly to obtain the second warpage.

4. The method of claim 3 , wherein positioning the plurality of stiffener members further comprises positioning the stiffener members in a predetermined pattern within the second semiconductor device assembly.

5. The method of claim 1 , wherein the stiffener member is a layer of controlled stress within the substrate or the semiconductor device.

6. The method of claim 1 , wherein tuning the stiffener member further comprises adding the stiffener member as a layer in situ in the substrate or the semiconductor device.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 18, 2017
From: YOO, CHAN H; TUTTLE, MARK E
To: MICRON TECHNOLOGY, INC.
Reel/Frame 043896/0664 →