Nano-patterning methods including: (1) patterning of nanophotonic structures at optical fiber tip for refractive index sensing and (2) plasmonic crystal incorporating graphene oxide gas sensor for detection of volatile organic compounds
View Patent ↗A technique, and its applications, for high resolution, rapid, and simple nanopatterning. The general method has been demonstrated in several forms and applications. One is patterning nanophotonic structures at an optical fiber tip for refractive index sensing. Another is patterning nanoresonator structures on a sensor substrate for plasmonic effect related detection of VOCs. In the latter example, a graphene oxide coated plasmonic crystal as a gas sensor capable of identifying different gas species using an array of such structures. By coating the surface of multiple identical plasmonic crystals with different thicknesses of Graphene-Oxide (GO) layer, the effective refractive index of the GO layer on each plasmonic crystal is differently modulated when exposed to a specific gas. Identification of various gas species is accomplished using pattern recognition algorithm.
1. A method of fabricating high resolution nanopatterns on a surface for optical sensing of analytes in gaseous/aqueous medium comprising:
forming a nanoscale resolution mold including a negative to a pre-designed nanopattern of nanostructures of predetermined form factor and periodicity;
placing a UV curable elastomer with transparency and refractive index control between a substrate and the mold to encase and shape the UV curable elastomer to the negative of the mold;
exposing the encased UV curable elastomer to UV radiation to cure the UV curable elastomer to a nanoscale resolution positive nanopattern adhered to the substrate;
applying an optical resonance layer to achieve optical resonances over the nanopattern;
applying an analyte-selective layer over the optical resonance layer to absorb the analyte to be sensed; and
utilizing the nanoscale resolution nanopattern and substrate to achieve optical resonances useful in optical sensing for the analyte.
2. The method of claim 1 further comprising:
adhering a curable material on the cleaved cross-sectional surface of a fiber optic; and
pressing the fiber cross-sectional surface and curable material into the positive nanopattern adhered to the substrate to trap and shape the curable material based on the nanopattern;
curing the adhered nanopatterned curable material; and
removing the fiber and adhered nanopatterned cured material from the positive nanopattern adhered to the substrate;
to produce an integrated fiber optic and nanoscale resolution nanopatterned tip.
3. The method of claim 2 wherein:
the curable material comprises UV curable resist;
the curable elastomer comprises a UV curable polymer;
the mold comprises PDMS.
4. The method of claim 3 wherein the nanopattern and the optical resonance layer comprise:
an optical grating;
photonic crystals; or
nanophotonic resonators.
5. The method of claim 3 further comprising using the integrated fiber optic and nanopatterned end to monitor surrounding refractive index change.
6. The method of claim 5 further comprising coating the tip with a material effective to work as a guided mode resonant (GMR) device.
7. The method of claim 1 further comprising applying to the cured positive nanopattern on the substrate:
the optical resonance layer comprising a titanium oxide material at least at the tops of the nanostructures of the nanopattern;
the analyte-selective material over the titanium oxide material adapted to promote binding or absorbing of a species of interest.
8. The method of claim 7 wherein:
the curable elastomer comprises a UV curable polymer;
the mold comprises PDMS;
the selective material is graphene oxide (GO).
9. The method of claim 8 further comprising applying a photo mask over selected portions of the mold before UV curing of the UV curable material.
10. The method of claim 7 further comprising using the nanopatterned substrate coated with metallic and selective materials to monitor surrounding refractive index change of species of interest at the selective material to detect concentration of the material of interest.