Display device, semiconductor device, and method of manufacturing display device
A display device according to the present disclosure includes: a transistor section ( 100 ) that includes a gate insulating film ( 130 ), a semiconductor layer ( 140 ), and a gate electrode layer ( 120 ), the semiconductor layer being laminated on the gate insulating film, the gate electrode film being laminated on an opposite side to the semiconductor layer of the gate insulating film; a first capacitor section ( 200 ) that includes a first metal film ( 210 ) and a second metal film ( 220 ), the first metal film being disposed at a same level as wiring layers ( 161, 162 ) that are electrically connected to the semiconductor layer and is disposed over the transistor section, the second metal film being disposed over the first metal film with a first interlayer insulating film ( 152 ) in between; and a display element that is configured to be controlled by the transistor section.
1. A display device comprising, in this order:
a substrate;
a semiconductor film;
a first insulating film;
a first metal film;
a second insulating film;
a second metal film;
a third insulating film;
a third metal film;
a fourth insulating film; and
a pixel electrode film,
wherein a pixel circuit region includes:
(1) a transistor including a first portion of the semiconductor film, a first portion of the first insulating film and a first portion of the first metal film;
(2) a first capacitor including a first portion of the second metal film, a first portion of the third insulating film and a first portion of the third metal film;
(3) a second capacitor including a second portion of the semiconductor film, a second portion of the first insulating film and a second portion of the first metal film; and
(4) a first wiring including a second portion of the second metal film, and the first wiring is electrically connected to the transistor,
wherein the first capacitor overlaps with the second capacitor in a plan view, and
wherein the pixel electrode film is disposed over the first capacitor.
2. The display device according to claim 1 , wherein the third insulating film includes at least one recessed portion in cross-sectional view.
3. The display device according to claim 1 ,
wherein a size of the first portion of the third metal film is different from a size of the first portion of the second metal film in the plan view.
4. The display device according to claim 3 , wherein the size of the first portion of the third metal film is larger than the size of the first portion of the second metal film in the plan view.
5. The display device according to claim 1 , wherein the pixel electrode film is disposed over the second capacitor.
6. The display device according to claim 1 , wherein the first insulating film includes at least one selected from the group consisting of silicon oxide, silicon nitride, polyimide, and an acrylic resin.
7. The display device according to claim 1 , wherein the third insulating film has a layered structure.
8. The display device according to claim 1 , wherein a thickness of the first portion of the third insulating film is from 50 nm to 500 nm.
9. The display device according to claim 1 ,
wherein a thickness of the first portion of the second metal film is from 100 nm to 1500 nm, and
wherein a thickness of the first portion of the third metal film is from 100 nm to 1500 nm.
10. The display device according to claim 1 , wherein the transistor is a driving transistor.
11. The display device according to claim 1 , further comprising an organic material formed on the pixel electrode film.
12. The display device according to claim 1 , wherein the first wiring is electrically connected to the transistor via a first contact hole formed in the second insulating film.
13. The display device according to claim 1 ,
wherein the pixel circuit region further includes a second wiring that includes a second portion of the third metal film, and
wherein the pixel electrode is electrically connected to the second wiring via a second contact hole formed in the fourth insulating film.
14. The display device according to claim 1 , wherein the first metal film includes molybdenum.
15. The display device according to claim 14 , wherein the second metal film includes aluminum.
16. The display device according to claim 15 , wherein the third metal film includes molybdenum.
17. A display device comprising, in this order:
a substrate;
a semiconductor film;
a first insulating film;
a first metal film;
a second insulating film;
a second metal film;
a third insulating film;
a third metal film;
a fourth insulating film; and
a pixel electrode film,
wherein a pixel circuit region includes:
(1) a transistor including a first portion of the semiconductor film, a first portion of the first insulating film and a first portion of the first metal film;
(2) a first capacitor including a first portion of the second metal film, a first portion of the third insulating film and a first portion of the third metal film;
(3) a second capacitor including a second portion of the semiconductor film, a second portion of the first insulating film and a second portion of the first metal film; and
(4) a light emitting element including the pixel electrode film,
wherein the light emitting element is configured to be controlled by the transistor, and
wherein the first capacitor overlaps with the second capacitor in a plan view.
18. The display device according to claim 17 ,
wherein the pixel circuit region further includes a first wiring that includes a second portion of the second metal film, and
wherein the first wiring is electrically connected to the transistor.
19. The display device according to claim 18 , wherein the first wiring is electrically connected to the transistor via a first contact hole formed in the second insulating film.
20. The display device according to claim 18 ,
wherein the pixel circuit region further includes a second wiring that includes a second portion of the third metal film, and
wherein the pixel electrode is electrically connected to the second wiring via a second contact hole formed in the fourth insulating film.
21. The display device according to claim 17 , wherein the third insulating film includes at least one recessed portion in cross-sectional view.
22. The display device according to claim 17 ,
wherein a size of the first portion of the third metal film is different from a size of the first portion of the second metal film in the plan view.
23. The display device according to claim 22 , wherein the size of the first portion of the third metal film is larger than the size of the first portion of the second metal film in the plan view.
24. The display device according to claim 17 , wherein the pixel electrode film is disposed over the second capacitor.
25. The display device according to claim 17 , wherein the first insulating film includes at least one selected from the group consisting of silicon oxide, silicon nitride, polyimide, and an acrylic resin.
26. The display device according to claim 17 , wherein the third insulating film has a layered structure.
27. The display device according to claim 17 , wherein a thickness of the first portion of the third insulating film is from 50 nm to 500 nm.
28. The display device according to claim 17 ,
wherein a thickness of the first portion of the second metal film is from 100 nm to 1500 nm, and
wherein a thickness of the first portion of the third metal film is from 100 nm to 1500 nm.
29. The display device according to claim 17 , wherein the transistor is a driving transistor.
30. The display device according to claim 17 , wherein the first metal film includes molybdenum.
31. The display device according to claim 30 , wherein the second metal film includes aluminum.
32. The display device according to claim 31 , wherein the third metal film includes molybdenum.
33. The display device according to claim 17 , wherein the light emitting element is an organic EL device.
34. The display device according to claim 17 , wherein the light emitting element includes a light emission layer including an organic material, and formed on the pixel electrode film.