IP Library Granted Patent US 10,141,174
Granted Patent B2
US 10,141,174 · App. 15/795,405 · Granted Nov 27, 2018

Method for examining a gas by mass spectrometry and mass spectrometer

Inventors: Michel Aliman (Oberkochen, DE); Alexander Laue (Heidenheim, DE); Hin Yiu Anthony Chung (Ulm, DE); Gennady Fedosenko (Aalen, DE); Ruediger Reuter (Aalen, DE); Leonid Gorkhover (Ulm, DE); Martin Antoni (Aalen, DE); Andreas Gorus (Essingen, DE); Valerie Derpmann (Aalen, DE)
Assignee: Carl Zeiss SMT GmbH
H01J49/38H01J49/0031H01J49/425H01J49/426H01J49/427H01J49/4295H01J49/027
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Quick Facts
Patent No.
US 10,141,174
App. No.
15/795,405
Granted
Nov 27, 2018
Kind
B2
Abstract

A method for examining a gas by mass spectrometry includes: ionizing the gas for producing ions; and storing, exciting and detecting at least some of the produced ions in an FT ion trap. Producing and storing the ions in the FT ion trap and/or exciting the ions prior to the detection of the ions in the FT ion trap includes at least one selective IFT excitation, such as a SWIFT excitation, which is dependent on the mass-to-charge ratio of the ions. The disclosure further relates to a mass spectrometer. A mass spectrometer includes: an FT ion trap; and an excitation device for storing, exciting, and detecting ions in the FT ion trap.

Claims (59)

1. A method, comprising:

producing ions by ionizing a gas;

storing at least some of the ions in an FT ion trap; and

detecting at least some of the ions in the FT ion trap,

wherein at least one of the following holds:

i) producing the ions comprises exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions;

ii) storing the ions in the FT ion trap comprises exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions; and

iii) before detecting the ions in the FT ion trap, exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions, and

wherein:

a degree of excitation and/or a phase angle of the IFT excitation are varied between a first excitation frequency and a second excitation frequency; and

both the first excitation frequency and the second excitation frequency deviate from a predetermined excitation frequency by no more than 10%.

2. The method of claim 1 , wherein i) holds, and the IFT excitation is used to select ions to store in the FT ion trap.

3. The method of claim 2 , wherein ii) holds.

4. The method of claim 3 , wherein iii) holds.

5. The method of claim 2 , wherein iii) holds.

6. The method of claim 1 , wherein ii) holds.

7. The method of claim 6 , wherein iii) holds.

8. The method of claim 1 , wherein iii) holds.

9. The method of claim 1 , wherein the IFT excitation comprises a SWIFT excitation.

10. The method of claim 1 , wherein:

at least one of i) and ii)holds; and

only ions whose mass-to-charge ratio lies outside of an interval of the mass-to-charge ratios of a main gas component of the gas are selected for storage.

11. The method as claimed in claim 1 , wherein the phase angle and/or the degree of excitation vary in steps between the first excitation frequency and the second excitation frequency, depending on the excitation frequency.

12. The method as claimed in claim 11 , wherein the degree of excitation and/or the phase angle either increase in steps or decrease in steps between the first excitation frequency and the second excitation frequency, depending on the excitation frequency.

13. The method of claim 1 , wherein the same ions are repeatedly selectively excited in the FT ion trap by IFT excitations, and detection of the ions is performed after a respective IFT excitation.

14. The method as claimed in claim 13 , wherein there is a time interval between two IFT excitations that immediately follow one another in time, and the time interval is greater than a mean free time of flight of the ions in the FT ion trap.

15. The method of claim 1 , further comprising examining an ion signal by mass spectrometry only in a temporally displaceable measurement time interval when detecting the ions.

16. The method of claim 1 , further comprising:

exciting the ions in the FT ion trap;

recording a first frequency spectrum;

modifying a phase angle and/or an oscillation amplitude of the ions in the FT ion trap and/or modifying ion resonance frequencies of the ions in the FT ion trap,

exciting the ions in the FT ion trap again and recording a second frequency spectrum; and

detecting interference frequencies in the FT ion trap by comparing the first recorded frequency spectrum and the second recorded frequency spectrum.

17. The method of claim 16 , wherein modifying the ion resonance frequencies comprises modifying a storage voltage and/or a storage frequency of the FT ion trap.

18. The method of claim 1 , further comprising determining a start phase angle of a trajectory of ions at a given ion resonance frequency after an IFT excitation on the basis of a time-dependent ion signal recorded when detecting the ions.

19. The method of claim 18 , further comprising determining a charge polarity of the ions based on the start phase angle of the ions after the IFT excitation.

20. A method, comprising:

producing ions by ionizing a gas;

storing at least some of the ions in an FT ion trap; and

detecting at least some of the ions in the FT ion trap,

wherein at least one of the following holds:

i) producing the ions comprises exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions;

ii) storing the ions in the FT ion trap comprises exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions; and

iii) before detecting the ions in the FT ion trap, exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions, and

wherein the method further comprises:

exciting the ions in the FT ion trap;

recording a first frequency spectrum;

modifying a phase angle and/or an oscillation amplitude of the ions in the FT ion trap and/or modifying ion resonance frequencies of the ions in the FT ion trap;

exciting the ions in the FT ion trap again and recording a second frequency spectrum; and

detecting interference frequencies in the FT ion trap by comparing the first recorded frequency spectrum and the second recorded frequency spectrum.

21. A method, comprising:

producing ions by ionizing a gas;

storing at least some of the ions in an FT ion trap; and

detecting at least some of the ions in the FT ion trap,

wherein at least one of the following holds:

i) producing the ions comprises exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions;

ii) storing the ions in the FT ion trap comprises exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions; and

iii) before detecting the ions in the FT ion trap, exposing the ions to an IFT excitation based on a mass-to-charge ratio of the ions, and

wherein the method further comprises determining a start phase angle of a trajectory of ions at a given ion resonance frequency after an IFT excitation on the basis of a time-dependent ion signal recorded when detecting the ions.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2020
From: CARL ZEISS SMT GMBH
To: LEYBOLD GMBH
Reel/Frame 053686/0527 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 1, 2017
From: ALIMAN, MICHEL; LAUE, ALEXANDER; CHUNG, HIN YIU; FEDOSENKO, GENNADY; REUTER, RUEDIGER; GORKHOVER, LEONID; ANTONI, MARTIN; GORUS, ANDREAS; DERPMANN, VALERIE
To: CARL ZEISS SMT GMBH
Reel/Frame 044271/0221 →
Priority Claims (1)
DE 10 2015 208 188 · May 4, 2015 · national
Continuity (2)
Continuation PCTEP2017055842 · Mar 17, 2016
Related Publication 20180068842A1 · Mar 8, 2018
Cited By (1)
US 12,347,668