Memory cell and methods thereof
According to various embodiments, a memory cell may include: a field-effect transistor structure comprising a channel region and a gate structure disposed at the channel region, the gate structure comprising a gate electrode structure and a gate isolation structure disposed between the gate electrode structure and the channel region; and a memory structure comprising a first electrode structure, a second electrode structure, and at least one remanent-polarizable layer disposed between the first electrode structure and the second electrode structure; wherein the first electrode structure of the memory structure is electrically conductively connected to the gate electrode structure of the field-effect transistor structure.
1. A memory cell, comprising:
a field-effect transistor structure comprising a channel region and a gate structure disposed at the channel region, the gate structure comprising a gate electrode structure and a gate isolation structure disposed between the gate electrode structure and the channel region; and
a memory structure comprising a first electrode structure, a second electrode structure, and at least one remanent-polarizable layer adjacent to the first electrode structure and disposed between the first electrode structure and the second electrode structure;
wherein the gate isolation structure comprises one or more high-k material layers disposed over one or more electrically insulating layers;
wherein the first electrode structure of the memory structure is physically disposed between the gate structure and the at least one remanent-polarizable layer and is electrically conductively connected to the gate electrode structure of the field-effect transistor structure.
2. The memory cell of claim 1 , wherein the field-effect transistor structure further comprises a semiconductor portion and at least a first source/drain region and a second source/drain region disposed in the semiconductor portion; and that the channel region extends in the semiconductor portion from the first source/drain region to the second source/drain region.
3. The memory cell of claim 1 , wherein the first electrode structure of the memory structure is in direct physical contact with the gate electrode structure of the field-effect transistor structure.
4. The memory cell of claim 3 , further comprising:
a contact metallization disposed over the field-effect transistor structure and the memory structure, the contact metallization comprising at least one memory contact structure electrically contacting the second electrode structure of the memory structure.
5. The memory cell of claim 1 , further comprising:
one or more metallization structures disposed over the field-effect transistor structure, the one or more metallization structures configured to electrically connect the gate electrode structure of the field-effect transistor structure to the first electrode structure of the memory structure.
6. The memory cell of claim 5 , wherein the one or more metallization structures comprise a contact metallization at least partially disposed between the field-effect transistor structure and the memory structure.
7. The memory cell of claim 5 , wherein the one or more metallization structures comprise a contact metallization and a single- or multilevel metallization disposed over the contact metallization;
wherein both the contact metallization and at least one level of the single- or multilevel metallization are disposed between the field-effect transistor structure and the memory structure.
8. The memory cell of claim 1 , wherein the at least one remanent-polarizable layer comprises at least one ferroelectric material.
9. The memory cell of claim 1 , wherein the first electrode structure comprises at least one layer of an electrically conductive material, and
wherein a lateral dimension of the at least one layer is greater than a lateral dimension of the at least one remanent-polarizable layer or greater than the lateral dimension of the second electrode structure.
10. The memory cell of claim 1 , wherein the memory structure has a concave shape.
11. The memory cell of claim 10 , wherein the memory structure has one or more angled sections and/or one or more arcuated sections.
12. The memory cell of claim 1 , wherein the gate structure of the field-effect transistor structure comprises a high-k metal gate structure.
13. The memory cell of claim 1 , wherein the field-effect transistor structure comprises at least one of the following types of field-effect transistor structures:
a fully depleted silicon on insulator field-effect transistor structure;
a fin field-effect transistor structure;
a trench gate field-effect transistor structure
a nanosheet field-effect transistor structure; or
a nanowire field-effect transistor structure.
14. The memory cell of claim 1 , wherein the gate electrode structure, the gate isolation structure, and the channel region forming a first capacitor structure defining a capacitor area of a first area size; and
wherein the first electrode structure, the at least one remanent-polarizable layer, and the second electrode structure forming a second capacitor structure defining a capacitor area of a second area size less than the first area size.