Low external resistance channels in III-V semiconductor devices

1. A method comprising:

removing a portion of a doped III-V compound semiconductor material layer of a III-V compound semiconductor substrate, the portion located between gate spacers formed on the doped III-V compound semiconductor material layer;

forming a raised source-drain (RSD) region on a surface of the doped III-V compound semiconductor material layer, the RSD region adjacent to and contacting a sidewall of the gate spacers formed on the doped III-V compound semiconductor material layer, a bottom surface of said raised source-drain region being coplanar with a bottom surface of said gate spacers;

forming a replacement channel in the portion, the replacement channel comprising a III-V compound semiconductor material, the replacement channel extending for a length defined by first and second sidewalls of the gate spacers, and

a top surface and a bottom surface of the replacement channel is coplanar with a respective top surface and a bottom surface of the doped III-V compound semiconductor material layer; and

forming a gate stack on the replacement channel, the gate stack having a sidewall that is coplanar with a sidewall of the replacement channel.

2. The method of claim 1 , wherein the III-V compound semiconductor substrate comprises:

a substrate layer, the substrate layer comprising Ge, Ga, GaAs, InAs, InP, GaP, or GaN;

a further III-V compound semiconductor material layer on the substrate layer, the further III-V compound semiconductor material layer comprising InP or InAlAs; and

the doped III-V compound semiconductor material layer on the further III-V compound semiconductor material layer, the doped III-V compound semiconductor material layer comprising InP or InGaAs doped with a conductivity dopant.

3. The method of claim 1 , wherein the doped III-V compound semiconductor material layer is doped with a n-type dopant or a p-type dopant.

4. The method of claim 1 , further comprising:

forming a dummy gate dielectric on the doped III-V compound semiconductor material layer;

forming a dummy gate on the dummy gate dielectric;

forming the gate spacers on the doped III-V compound semiconductor material layer, the gate spacers adjacent to and contacting a sidewall of the dummy gate dielectric and a sidewall of the dummy gate;

forming an insulator layer on the RSD region, the insulator layer contacting the sidewall of the gate spacers and the insulator layer having, an upper surface that is flush with an upper surface of the dummy gate;

removing the dummy gate; and

removing the dummy gate dielectric.

5. The method of claim 4 , wherein the RSD region is doped with a dopant having a matching conductivity type of the doped III-V compound semiconductor material layer.

6. The method of claim 1 , wherein the forming the replacement channel in the portion comprises;

removing a portion of the doped III-V compound semiconductor material layer selective to the further III-V compound semiconductor material layer to form a channel gap; and

growing a III-V compound semiconductor material in the channel region using an epitaxial growth process, wherein the III-V compound semiconductor material comprises InP or InGaAs.

7. The method of claim 6 , wherein the removing the portion of the doped III-V compound semiconductor material layer selective to the further III-V compound semiconductor material layer to form the channel gap comprises performing a reactive ion etching (RIE) process.

8. The method of claim 1 , further comprising:

doping the replacement channel with a dopant having an opposite conductivity type of the doped III-V compound semiconductor material layer.

9. The method of claim 1 , further comprising:

annealing the replacement channel and the doped III-V compound semiconductor material layer, such that dopant atoms from the doped III-V compound semiconductor material layer diffuse into the replacement channel.

10. A method comprising:

forming a dummy gate dielectric on a doped III-V compound semiconductor material layer of a III-V compound semiconductor substrate;

forming a dummy gate on the dummy gate dielectric;

forming a gate spacer on the doped III-V compound semiconductor material layer, the gate spacer adjacent to and contacting a sidewall of the dummy gate dielectric and a sidewall of the dummy gate;

forming a raised source-drain (RSD) region on a surface of the doped III-V compound semiconductor material layer, the RSD region adjacent to and contacting a sidewall of the gate spacer, a bottom surface of said raised source-drain region being coplanar with a bottom surface of said gate spacer;

forming an insulator layer on the RSD region, the insulator layer contacting the sidewall of the gate spacer and the insulator layer having an upper surface that is flush with an upper surface of the dummy gate;

removing the dummy gate;

removing the dummy gate dielectric;

removing a portion of the doped III-V compound semiconductor material layer to form a channel opening;

forming a III-V compound semiconductor material replacement channel in the channel opening, said III-V compound semiconductor material replacement channel extending for a length defined by first and second sidewalls of the gate spacer, and

a top surface and a bottom surface of the III-V compound semiconductor material replacement channel is coplanar with a respective top surface and a bottom surface of the doped III-V compound semiconductor material layer; and

forming a gate stack on the III-V compound semiconductor material replacement channel, the gate stack having a sidewall that is coplanar with a sidewall of the spacer.

11. The method of claim 10 , wherein the III-V compound semiconductor substrate comprises:

a substrate layer, the substrate layer comprising Ge, Ga, GaAs, InAs, InP, GaP, or GaN;

a further III-V compound semiconductor material layer on the substrate layer, the further III-V compound semiconductor material layer comprising InP or InAlAs; and

the doped III-V compound semiconductor material layer on the further III-V compound semiconductor material layer, the doped III-V compound semiconductor material layer comprising InP or InGaAs doped with a conductivity dopant.

12. The method of claim 10 , wherein the doped III-V compound semiconductor material layer is doped with a n-type dopant or a p-type dopant.

13. The method of claim 10 , wherein the RSD region is doped with a dopant having a matching conductivity type of the doped III-V compound semiconductor material layer.

14. The method of claim 10 , wherein the removing the portion of the doped III-V compound semiconductor material layer to form the channel opening comprises:

removing the portion of the doped III-V compound semiconductor material layer using reactive ion etching such that the channel opening having a width that is similar to a width of the dummy gate.

15. The method of claim 10 , wherein the forming the III-V compound semiconductor material replacement channel in the channel opening comprises:

growing a III-V compound semiconductor material in the channel opening using an epitaxial growth process, wherein the III-V compound semiconductor material comprises InP or InGaAs.

16. The method of claim 10 , further comprising:

doping the III-V compound semiconductor material replacement channel with a dopant having an opposite conductivity type of the doped III-V compound semiconductor material layer.

17. The method of claim 10 , further comprising:

annealing the III-V compound semiconductor material channel and the doped III-V compound semiconductor material layer, such that dopant atoms from the doped III-V compound semiconductor material layer diffuse into the III-V compound semiconductor material channel.