High dynamic range pixel with in-pixel light shield structures
View Patent ↗Multi-photodiode image pixels may include sub-pixels with differing light sensitivities. Microlenses may be formed over the multi-photodiode image pixels so that light sensitivity of sub-pixels in an outer group of sub-pixels is enhanced. To prevent high angle light incident upon one of the sub-pixels of the image pixel from generating charges in a photosensitive region of another sub-pixel of the image pixel, intra-pixel isolation structures may be formed. Intra-pixel isolation structures may surround, and in some embodiments, overlap the light collecting region of an inner photodiode. When the intra-pixel isolation structures have a different index of refraction than light filtering material formed adjacent to the isolation structures, high angle light incident upon the isolation structures may be reflected back into the sub-pixel it was initially incident upon. Intra-pixel isolation structures may be formed entirely from optically transparent materials or a combination of optically transparent and opaque materials.
1. An image pixel, comprising:
an outer sub-pixel group that includes at least a first sub-pixel, wherein the first sub-pixel has a first light sensitivity;
an inner sub-pixel group that is nested within the outer sub-pixel group and that includes at least a second sub-pixel, wherein the second sub-pixel has a second light sensitivity that is less than the first light sensitivity;
a light filter layer formed over at least the outer sub-pixel group;
an inter-pixel light shielding structure that is formed at an outer boundary of the image pixel; and
an intra-pixel light shielding structure that is formed over an outer perimeter of the inner sub-pixel group, wherein the light filter layer, the inter-pixel light shielding structure, and the intra-pixel light shielding structure are coplanar.
2. The image pixel of claim 1 , wherein the light filter layer is formed only between the inter-pixel light shielding structure and the intra-pixel light shielding structure.
3. The image pixel of claim 2 , wherein the intra-pixel light shielding structure completely covers the second sub-pixel.
4. The image pixel of claim 3 , wherein the light filter layer is a clear filter.
5. The image pixel of claim 1 , wherein the light filter layer has a first portion formed over the inner sub-pixel group and a second portion formed over the outer sub-pixel group, wherein the intra-pixel light shielding structure extends in a ring around the first portion, wherein the inter-pixel light shielding structure extends in a ring around the second portion, and wherein the second portion is interposed between the intra-pixel light shielding structure and the inter-pixel light shielding structure.
6. The image pixel of claim 5 , wherein the light filter layer is a color filter.
7. The image pixel of claim 5 , wherein the light filter layer is a color filter and wherein the first and second portions both transmit the same color of light.
8. The image pixel of claim 1 , wherein the intra-pixel light shielding structure has an optically transparent portion having a first index of refraction and wherein the light filter layer has a second index of refraction that is different from the first index of refraction.
9. The image pixel of claim 1 , wherein the intra-pixel light shielding structure comprises:
an optically opaque portion that is formed over the outer perimeter of the inner sub-pixel group; and
an optically transparent portion that is formed over the optically opaque portion.
10. The image pixel of claim 1 , further comprising:
microlenses that direct incident light toward the second sub-pixel group.
11. The image pixel of claim 1 , further comprising:
a toroidal microlens that directs light toward the second sub-pixel group.
12. The image pixel of claim 1 , further comprising:
fin structures that connect the inter-pixel light shielding structure and the intra-pixel light shielding structure.
13. The image pixel of claim 1 , wherein the outer sub-pixel group and the inner sub-pixel group are concentric.
14. The image pixel of claim 1 , further comprising:
a toroidal microlens that covers the outer sub-pixel group and that has an opening, wherein the opening in the toroidal microlens overlaps the inner sub-pixel group.
15. An image pixel, comprising:
an outer sub-pixel group that includes at least a first sub-pixel, wherein the first sub-pixel has a first light sensitivity;
an inner sub-pixel group that is nested within the outer sub-pixel group and that includes at least a second sub-pixel, wherein the second sub-pixel has a second light sensitivity that is less than the first light sensitivity;
a light filter layer formed over at least the outer sub-pixel group;
a toroidal microlens that covers the outer sub-pixel group and that has an opening, wherein the opening in the toroidal microlens overlaps the inner sub-pixel group;
an inter-pixel light shielding structure that is formed at an outer boundary of the image pixel; and
an intra-pixel light shielding structure that is formed over an outer perimeter of the inner sub-pixel group.
16. An image pixel, comprising:
an outer sub-pixel group that includes at least a first sub-pixel that has a first light sensitivity;
an inner sub-pixel group that includes at least a second sub-pixel that has a second light sensitivity that is less than the first light sensitivity, wherein the outer sub-pixel group and the inner sub-pixel group are concentric;
a light filter layer formed over at least the outer sub-pixel group;
an inter-pixel light shielding structure that is formed at an outer boundary of the image pixel; and
an intra-pixel light shielding structure that is formed over an outer perimeter of the inner sub-pixel group.