Compact microelectronic integrated gas sensor
A compact microelectronic gas sensor module includes electrical contacts formed in such a way that they do not consume real estate on an integrated circuit chip. Using such a design, the package can be miniaturized further. The gas sensor is packaged together with a custom-designed Application Specific Integrated Circuit (ASIC) that provides circuitry for processing sensor signals to identify gas species within a sample under test. In one example, the output signal strength of the sensor is enhanced by providing an additional metal surface area in the form of pillars exposed to an electrolytic gas sensing compound, while reducing the overall package size. In some examples, bottom side contacts are formed on the underside of the substrate on which the gas sensor is formed. Sensor electrodes may be electrically coupled to the ASIC directly, or indirectly by vias.
1. A device, comprising:
a substrate having a first surface and a second surface opposite the first surface;
a recess extending into the first surface of the substrate, the recess having a base surface, a first sidewall surface, and a second sidewall surface that is opposite the first sidewall surface;
a plurality of sensor electrodes having sensing surfaces that are coplanar with the base surface of the recess, and between the first sidewall surface and the second sidewall surface, the plurality of sensor electrodes being spaced from the first sidewall surface and the second sidewall surface by portions of the substrate;
a chemireactive gas sensing compound in the recess, the chemireactive gas sensing compound in contact with the base surface, the first sidewall surface, and the second sidewall surface of the recess and the sensing surfaces of the plurality of sensor electrodes;
an insulator layer on the second surface of the substrate;
a plurality of contacts on the second surface of the substrate and extending through the insulator layer;
a plurality of conductive vias extending through the substrate and electrically coupled between the plurality of sensor electrodes and the plurality of contacts; and
a lid on the substrate and overlying the recess, the lid having a plurality of openings that expose the chemireactive gas sensing compound to an environment outside of the recess.
2. The device of claim 1 , further comprising:
an integrated circuit in the substrate, the integrated circuit being electrically coupled to at least one of the plurality of sensor electrodes and at least one of the plurality of contacts.
3. A method, comprising;
forming a recess in a substrate, the substrate having a first surface and a second surface opposite the first surface, the recess extending into the first surface of the substrate, the recess having a base surface, a first sidewall surface, and a second sidewall surface that is opposite the first sidewall surface;
forming a plurality of sensor electrodes having sensing surfaces that are coplanar with the base surface of the recess, and between the first sidewall surface and the second sidewall surface, the plurality of sensor electrodes being spaced from the first sidewall surface and the second sidewall surface by portions of the substrate;
forming a chemireactive gas sensing compound in the recess, the chemireactive gas sensing compound in contact with the base surface, the first sidewall surface, and the second sidewall surface of the recess and the sensing surfaces of the plurality of sensor electrodes;
forming an insulator layer on the second surface of the substrate;
forming a plurality of contacts on the second surface of the substrate and extending through the insulator layer;
forming a plurality of conductive vias that extend through the substrate and electrically coupled between from the plurality of sensor electrodes, through the substrate, and the plurality of contacts; and
forming a lid on and the substrate and overlying the recess, the lid having a plurality of openings that expose the chemireactive gas sensing compound to an environment outside of the recess.
4. The method of claim 3 , further comprising:
forming an integrated circuit in the substrate, the integrated circuit being electrically coupled to at least one of the plurality of sensor electrodes and at least one of the plurality of contacts.
5. A device, comprising:
a substrate having a first surface and a second surface opposite the first surface;
a cavity extending into the first surface of the substrate, the cavity having a base surface, a first sidewall surface, and a second sidewall surface opposite the first sidewall surface;
a plurality of electrodes between the first sidewall and the second sidewall, the base surface of the cavity and surfaces of the plurality of electrodes forming a planar surface, a first portion of the base surface being between the first sidewall and a first one of the plurality of sensor electrodes that is adjacent to the first sidewall, a second portion of the base surface being between the second sidewall and a second one of the plurality of sensor electrodes that is adjacent to the second sidewall;
a chemireactive gas sensing compound in the cavity, the chemireactive gas sensing compound in contact with the first portion and the second portion of the base surface, the first sidewall surface, the second sidewall surface, and the surfaces of the plurality of electrodes,
an insulator layer on the second surface of the substrate;
a plurality of conductive contacts on the second surface of the substrate, the plurality of electrodes and the plurality of conductive contacts being spaced from each other by the substrate, the plurality of conductive contacts extending through the insulator layer; and
a plurality of conductive vias extending from the plurality of electrodes, through the substrate, and to the plurality of conductive contacts, the plurality of conductive vias electrically coupling the plurality of electrodes and the plurality of conductive contacts to each other, each of the plurality of electrodes being aligned with a respective conductive contact of the plurality of conductive contacts and a respective conductive via of the plurality of conductive vias.
6. The device of claim 5 , further comprising:
a lid on the first surface of the substrate and directly overlying the base of the cavity, the lid including a plurality of openings, at least one of the plurality of openings directly overlying at least one of the plurality of electrodes.
7. The device of claim 1 wherein the plurality of contacts are spaced from the recess by the substrate.
8. The device of claim 1 wherein the second surface is spaced apart from the chemireactive gas sensing compound.
9. The device of claim 1 wherein the plurality of contacts are spaced apart from the chemireactive gas sensing compound.
10. The device of claim 1 wherein the lid is attached to the substrate, and at least one of the plurality of openings directly overlies at least one of the plurality of sensor electrodes.
11. The device of claim 1 wherein the plurality of conductive vias extends in a first direction, the substrate has a first dimension in a second direction transverse to the first direction, the recess has a second dimension in the second direction between the first sidewall surface and the second sidewall surface, the lid has a third dimension in the second direction, and the third dimension is less than the first dimension and greater than the second dimension.
12. The device of claim 1 wherein the chemireactive gas sensing compound contacts the portions of the substrate.
13. The device of claim 1 wherein the lid has a first surface and a second surface opposite the first surface, the first surface of the lid is coplanar with the first surface of the substrate, and the second surface of the lid faces the base surface of the recess.
14. The device of claim 5 wherein the first one of the plurality of sensor electrodes is spaced from the second one of the plurality of sensor electrodes by a third one of the plurality of sensor electrodes.
15. The device of claim 5 wherein the first one of the plurality of sensor electrodes has a first width, and a first one of the plurality of conductive contacts electrically coupled with the first one of the plurality of sensor electrodes has a second width different from the first width.