IP Library › Granted Patent US 10,831,018
Granted Patent B2
US 10,831,018 · App. 15/836,521 · Granted Nov 10, 2020

Methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator

Inventors: Adam Joseph Fruehling (Dallas, TX); James Norman Hall (Parker, TX)
Assignee: TEXAS INSTRUMENTS INCORPORATED
G02B26/06G02B26/0833G02B26/0841G09G3/3466B81B2201/04
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Quick Facts
Patent No.
US 10,831,018
App. No.
15/836,521
Granted
Nov 10, 2020
Kind
B2
Abstract

In methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator, an example apparatus includes: an electrode with spring legs; a base electrode; a mirror displacement determiner to determine a periodic signal corresponding to a displacement distance of the electrode beyond an instability point of the electrode; and a voltage source to output a periodic voltage to the base electrode in response to the periodic signal. The periodic voltage causes the spring legs to vary displacement of the electrode with respect to the base electrode according to the periodic voltage. The displacement includes distances beyond the instability point.

Claims (31)

1. Apparatus to increase displacement of a mirror in a microelectromechanical system piston-mode spatial light modulator, the apparatus comprising:

an electrode with spring legs;

a base electrode;

a receiver configured to receive an instruction to displace the electrode by a displacement distance;

a mirror displacement determiner coupled to the receiver and configured to determine that the displacement distance is beyond an instability point of the electrode and to determine a periodic signal corresponding to the displacement distance; and

a voltage source to output a periodic voltage to the base electrode in response to the periodic signal, the periodic voltage to cause the spring legs to vary displacement of the electrode with respect to the base electrode according to the periodic voltage, the displacement including distances beyond the instability point.

2. The apparatus of claim 1 , further including a transmitter to transmit at least one of periodic voltage data or sampling data to a receiving device.

3. The apparatus of claim 1 , wherein the periodic voltage is to allow the electrode to displace beyond the instability point without collapsing.

4. The apparatus of claim 1 , wherein the periodic voltage is at least one of a digital pulsing signal or a sinusoid.

5. The apparatus of claim 1 , wherein, when the instruction is for a displacement distance that is less than the instability point of the electrode:

the mirror displacement determiner is to determine a stable signal corresponding to the displacement distance; and

in response to the stable signal, the voltage source is to output a stable voltage to the base electrode to cause the spring legs to displace the electrode to the displacement distance.

6. The apparatus of claim 1 , wherein the electrode is coupled to the mirror.

7. A method to increase displacement of a mirror in a microelectromechanical system piston-mode spatial light modulator, the method comprising:

determining a periodic signal corresponding to a displacement distance of an electrode of a pixel beyond an instability point of the electrode; and

outputting a periodic voltage to a base electrode in response to the periodic signal, the periodic voltage causing spring legs of the electrode to vary displacement of the electrode with respect to the base electrode according to the periodic voltage, the displacement including distances beyond the instability point.

8. The method of claim 7 , further including transmitting at least one of periodic voltage data or sampling data to a receiving device.

9. The method of claim 7 , wherein outputting the periodic voltage allows the spring legs to displace the electrode beyond the instability point without collapsing.

10. The method of claim 7 , wherein the periodic voltage is at least one of a digital pulsing signal or a sinusoid.

11. The method of claim 7 , further including:

when the displacement distance is less than the instability point of the electrode: determining a stable signal corresponding to the displacement distance; and, in response to the stable signal, outputting a stable voltage to the base electrode to cause the spring legs to displace the electrode to the displacement distance.

12. The method of claim 7 , wherein the electrode is coupled to the mirror.

13. A non-transitory computer-readable medium storing instructions that are processable by an instruction execution apparatus for causing the apparatus to perform a method comprising:

determining a periodic signal corresponding to a displacement distance of an electrode of a pixel beyond an instability point of the electrode; and

outputting a periodic voltage to a base electrode in response to the periodic signal, the periodic voltage causing spring legs of the electrode to vary displacement of the electrode with respect to the base electrode according to the periodic voltage, the displacement including distances beyond the instability point.

14. The computer readable storage medium of claim 13 , wherein the method includes transmitting at least one of periodic voltage data or sampling data to a receiving device.

15. The computer readable storage medium of claim 13 , wherein outputting the periodic voltage allows the spring legs to displace the electrode beyond the instability point without collapsing.

16. The computer readable storage medium of claim 13 , wherein the periodic voltage is at least one of a digital pulsing signal or a sinusoid.

17. The computer readable storage medium of claim 13 , wherein the method includes:

when the displacement distance is less than the instability point of the electrode: determining a stable signal corresponding to the displacement distance; and, in response to the stable signal, outputting a stable voltage to the base electrode to cause the spring legs to displace the electrode to the displacement distance.

18. The computer readable storage medium of claim 13 , wherein the electrode is coupled to a mirror.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 20, 2017
From: FRUEHLING, ADAM JOSEPH; HALL, JAMES NORMAN
To: TEXAS INSTRUMENTS INCORPORATED
Reel/Frame 044957/0677 →
Continuity (1)
Related Publication 20190179134A1 · Jun 13, 2019
Cited By (1)
US 12,339,437