Semiconductor device and method of manufacturing the same
A semiconductor device is provided. The semiconductor device includes an electrode pad provided above a semiconductor substrate; and a wire bonded on the electrode pad and including copper. The electrode pad includes an electrode layer including aluminum and a support layer harder than the wire and the electrode layer. The wire is in contact with the electrode layer and the support layer.
1. A semiconductor device, comprising:
an electrode pad provided above a semiconductor substrate; and
a wire bonded on the electrode pad and including copper, wherein
the electrode pad comprises an electrode layer including aluminum and a support layer harder than the wire and the electrode layer, and
the wire is in direct contact with the electrode layer and the support layer.
2. The semiconductor device of claim 1 , wherein the support layer penetrates the electrode layer from an upper surface of the electrode layer to a lower surface of the electrode layer.
3. The semiconductor device of claim 1 , wherein the support layer comprises a ring-shaped portion extending in a ring shape at an upper surface of the electrode pad.
4. The semiconductor device of claim 3 , wherein the support layer comprises a lattice-shaped portion extending in a lattice shape at the upper surface of the electrode pad in a range surrounded by the ring-shaped portion.
5. The semiconductor device of claim 3 , wherein the wire is in direct contact with an entirety of the ring-shaped portion.
6. The semiconductor device of claim 1 , wherein the electrode pad comprises a plurality of the support layers being in direct contact with the wire.
7. The semiconductor device of claim 1 , wherein
the electrode pad and the wire are covered with a resin including sulfur, and
a combination of the wire and the support layer is less likely to be alloyed than a combination of the wire and the electrode layer.
8. The semiconductor device of claim 1 , wherein the support layer includes tungsten.
9. The semiconductor device of claim 1 , wherein the support layer includes silicon oxide.
10. A method of manufacturing a semiconductor device, the method comprising:
bonding a wire including copper on an electrode pad provided above a semiconductor substrate,
wherein
the electrode pad comprises an electrode layer including aluminum and a support layer harder than the wire and the electrode layer, and
the wire is bonded on the electrode pad so that the wire makes direct contact with the electrode layer and the support layer in the bonding.