IP Library Granted Patent US 10,145,673
Granted Patent B2
US 10,145,673 · App. 15/858,594 · Granted Dec 4, 2018

Method and device for measuring plating ring assembly dimensions

Inventor: Sven Heiko Grünzig (Dresden, DE)
Assignee: GLOBALFOUNDRIES INC.
G01B11/002G01N21/8806G01N21/9501G01N2201/06113
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Quick Facts
Patent No.
US 10,145,673
App. No.
15/858,594
Granted
Dec 4, 2018
Kind
B2
Abstract

A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.

Claims (31)

1. A measurement device configured for attachment to a plating ring assembly, the measurement device comprising:

a clamp shape-adapted to an outer ring of the plating ring assembly such that the clamp can be fixedly secured and capable of moving along a circumference of the outer ring;

an optical sensor configured to obtain critical dimensions of and between a seal and contact fingers of the plating ring assembly; and

a programmed processor for processing the critical dimensions obtained by the optical sensor.

2. The device according to claim 1 , wherein the programmed processor is located on the measuring device.

3. The device according to claim 1 , wherein the programmed processor is located remotely from the measuring device.

4. The device according to claim 1 , wherein the measurement device is configured to rotate at least 360° along the circumference of the outer ring of the plating ring assembly.

5. The device according to claim 1 , wherein the measurement device is configured to change position back and forth between the seal and contact fingers of the plating ring assembly between or during rotation of the measurement device with a stepping motor.

6. The device according to claim 1 , wherein the critical dimensions include z-axis and y-axis distances of and between the seal and the contact fingers.

7. The device according to claim 6 , wherein the optical sensor is selected from a laser spot sensor, laser profile sensor or a confocal sensor.

8. The device according to claim 7 , wherein the optical sensor is configured to emit light through an opening in the measuring device down to the plating ring assembly.

9. The device according to claim 1 , further comprising:

a spring contained in the clamp to apply a force to the clamp.

10. The device according to claim 1 , wherein the spring of the clamp eliminates a movement of the measurement device in a Y-axis direction and provides sufficient contact of a shoe of the clamp to the plating ring assembly.

11. A measurement device configured for attachment to a plating ring assembly, the measurement device comprising:

a clamp having a shoe and spring, the clamp shape-adapted to an outer ring of the plating ring assembly such that the clamp can be fixedly secured and capable of moving along a circumference of the outer ring;

an optical sensor configured to obtain critical dimensions of and between a seal and contact fingers of the plating ring assembly, the optical sensor configured to emit light through an opening in the measuring device down to the plating ring assembly; and

a programmed processor for processing the critical dimensions obtained by the optical sensor, wherein the critical dimensions include z-axis and y-axis distances of and between the seal and the contact fingers.

12. The measurement device according to claim 11 , wherein the spring of the clamp eliminates a movement of the measurement device in a Y-axis direction and provides sufficient contact of the shoe of the clamp to the plating ring assembly.

13. The device according to claim 11 , wherein the programmed processor is located on the measuring device.

14. The device according to claim 11 , wherein the programmed processor is located remotely from the measuring device.

15. The device according to claim 11 , wherein the measurement device is configured to rotate at least 360° along the circumference of the outer ring of the plating ring assembly.

16. The device according to claim 11 , wherein the measurement device is configured to change position back and forth between the seal and contact fingers of the plating ring assembly between or during rotation of the measurement device with a stepping motor.

17. A measurement device configured for attachment to a plating ring assembly, the measurement device comprising:

a clamp shape-adapted to an outer ring of the plating ring assembly such that the clamp can be fixedly secured and configured to rotate at least 360° along the circumference of the outer ring of the plating ring assembly;

an optical sensor configured to obtain critical dimensions of and between a seal and contact fingers of the plating ring assembly; and

a programmed processor for processing the critical dimensions obtained by the optical sensor,

wherein the measurement device is configured to change position back and forth between the seal and contact fingers of the plating ring assembly between or during rotation of the measurement device with a stepping motor.

18. The measurement device according to claim 17 , wherein the spring of the clamp eliminates a movement of the measurement device in a Y-axis direction and provides sufficient contact of the shoe of the clamp to the plating ring assembly.

19. The device according to claim 17 , wherein the programmed processor is located on the measuring device.

20. The device according to claim 17 , wherein the programmed processor is located remotely from the measuring device.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 2, 2018
From: GRÜNZIG, SVEN HEIKO
To: GLOBALFOUNDRIES INC.
Reel/Frame 044515/0789 →
Continuity (2)
Continuation 15458124 · Mar 14, 2017
Related Publication 20180266807A1 · Sep 20, 2018