Imprint template manufacturing apparatus and imprint template manufacturing method
According to one embodiment, an imprint template manufacturing apparatus includes: a supply head that supplies a liquid-repellent material in liquid form to a template having a convex portion where a concavo-convex pattern is formed on a stage; a moving mechanism that moves the stage and the supply head relatively in a direction along the stage; a controller that controls the supply head and the moving mechanism such that the supply head applies the liquid-repellent material to at least a side surface of the convex portion so as to avoid the concavo-convex pattern; and a cleaning unit that supplies a liquid to the template coated with the liquid-repellent material. The liquid-repellent material contains a liquid-repellent component and a non-liquid-repellent component that react with the surface of the template, and a volatile solvent that dissolves the liquid-repellent component. The liquid is a fluorine-based volatile solvent that dissolves the non-liquid-repellent component.
1. An imprint template manufacturing apparatus, comprising:
a stage configured to support a template that includes
a base having a main surface, and
a convex portion provided on the main surface and having an end surface on which a concavo-convex pattern to be pressed against a liquid transfer-receiving material is formed;
a supply head configured to supply a liquid-repellent material in liquid form, which repels the liquid transfer-receiving material, to the template on the stage;
a moving mechanism configured to move the stage and the supply head relative to each other in a direction along the stage;
a controller configured to control the supply head and the moving mechanism such that the supply head applies the cleaning liquid-repellent material to at least a side surface of the convex portion so as to avoid the concavo-convex pattern; and
a cleaning unit configured to supply a cleaning liquid to the template coated with the liquid-repellent material, wherein
the liquid-repellent material contains
a liquid-repellent component that reacts with a surface of the template,
a non-liquid-repellent component that reacts with the surface of the template, and
a volatile solvent that dissolves the cleaning liquid-repellent component, and
the cleaning liquid is a fluorine-based volatile solvent that dissolves the non-liquid-repellent component.
2. The imprint template manufacturing apparatus according to claim 1 , wherein the controller is further configured to control the supply head and the moving mechanism such that the supply head supplies the liquid-repellent material to the main surface around the convex portion to apply the liquid-repellent material to the side surface of the convex portion.
3. The imprint template manufacturing apparatus according to claim 1 , wherein
the volatile solvent that dissolves the liquid-repellent component is a fluorine-based solvent, and
the fluorine-based volatile solvent is more volatile than the volatile solvent that dissolves the liquid-repellent component.
4. The imprint template manufacturing apparatus according to claim 1 , wherein the fluorine-based volatile solvent is a fluorine-based inert liquid.
5. The imprint template manufacturing apparatus according to claim 1 , wherein
the cleaning unit includes
a cleaning supply head configured to supply the cleaning liquid to the template coated with the liquid-repellent material, and
a rotation mechanism configured to rotate the template coated with the liquid-repellent material in a horizontal plane, and
the controller is further configured to control the cleaning supply head and the rotation mechanism such that the rotation mechanism rotates the template after the cleaning supply head starts supplying the cleaning liquid.