IP Library Granted Patent US 10,734,383
Granted Patent B2
US 10,734,383 · App. 15/860,046 · Granted Aug 4, 2020

Methods, structures, and designs for self-aligning local interconnects used in integrated circuits

Inventors: Michael C. Smayling (Fremont, CA); Scott T. Becker (Scotts Valley, CA)
Assignee: Tela Innovations, Inc.
H01L27/092G06F30/394H01L21/28518H01L21/76895H01L21/76897H01L21/823475H01L21/823828H01L21/823871H01L23/528H01L27/0207H01L27/088H01L27/105G03F1/14H01L2924/0002
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Quick Facts
Patent No.
US 10,734,383
App. No.
15/860,046
Granted
Aug 4, 2020
Kind
B2
Abstract

An integrated circuit includes a gate electrode level region that includes a plurality of linear-shaped conductive structures. Each of the plurality of linear-shaped conductive structures is defined to extend lengthwise in a first direction. Some of the plurality of linear-shaped conductive structures form one or more gate electrodes of corresponding transistor devices. A local interconnect conductive structure is formed between two of the plurality of linear-shaped conductive structures so as to extend in the first direction along the two of the plurality of linear-shaped conductive structures.

Claims (38)

1. An integrated circuit, comprising:

a local interconnect conductive structure including a first portion and a second portion, the first portion of the local interconnect conductive structure having a substantially rectangular shape with a length measured in a first direction and a width measured in a second direction, the second portion of the local interconnect conductive structure having a substantially rectangular shape with a length measured in the second direction and a width measured in the first direction, the second portion of the local interconnect conductive structure connected to the first portion of the local interconnect conductive structure at a location in the second direction between neighboring gate electrode level conductive structures, wherein the first portion of the local interconnect structure is self-aligned between the neighboring gate electrode level conductive structures.

2. The integrated circuit as recited in claim 1 , wherein the length of the first portion of the local interconnect conductive structure is greater than the width of the second portion of the local interconnect conductive structure.

3. The integrated circuit as recited in claim 1 , wherein the length of the second portion of the local interconnect conductive structure is greater than the width of the first portion of the local interconnect conductive structure.

4. The integrated circuit as recited in claim 1 , wherein the length of the first portion of the local interconnect conductive structure is greater than the width of the second portion of the local interconnect conductive structure, and wherein the length of the second portion of the local interconnect conductive structure is greater than the width of the first portion of the local interconnect conductive structure.

5. The integrated circuit as recited in claim 1 , further comprising:

a contact conductive structure formed to physically contact the second portion of the local interconnect conductive structure.

6. The integrated circuit as recited in claim 5 , wherein the first portion of the local interconnect conductive structure is not contacted by any contact conductive structure.

7. The integrated circuit as recited in claim 5 , further comprising:

a first gate electrode level conductive structure having a substantially rectangular shape with a length measured in the first direction and a width measured in the second direction; and

a second gate electrode level conductive structure having a substantially rectangular shape with a length measured in the first direction and a width measured in the second direction,

wherein a first part of the first portion of the local interconnect conductive structure is positioned between the first gate electrode level conductive structure and the second gate electrode level conductive structure.

8. The integrated circuit as recited in claim 7 , wherein the first part of the first portion of the local interconnect conductive structure is separated from the first gate electrode level conductive structure by a first distance as measured in the second direction, and wherein the first part of the first portion of the local interconnect conductive structure is separated from the second gate electrode level conductive structure by the first distance as measured in the second direction.

9. The integrated circuit as recited in claim 8 , further comprising:

a third gate electrode level conductive structure having a substantially rectangular shape with a length measured in the first direction and a width measured in the second direction,

wherein a second part of the first portion of the local interconnect conductive structure is positioned between the first gate electrode level conductive structure and the third gate electrode level conductive structure.

10. The integrated circuit as recited in claim 9 , wherein the second part of the first portion of the local interconnect conductive structure is separated from the first gate electrode level conductive structure by the first distance as measured in the second direction, and wherein the second part of the first portion of the local interconnect conductive structure is separated from the third gate electrode level conductive structure by the first distance as measured in the second direction.

11. The integrated circuit as recited in claim 10 , wherein the second portion of the local interconnect conductive structure extends in the second direction between the second gate electrode level conductive structure and the third gate electrode level conductive structure.

12. The integrated circuit as recited in claim 11 , wherein the contact conductive structure is not positioned between the second gate electrode level conductive structure and the third gate electrode level conductive structure.

13. The integrated circuit as recited in claim 12 , wherein the second gate electrode level conductive structure is separated from the first gate electrode level conductive structure by a second distance as measured in the second direction, and wherein the third gate electrode level conductive structure is separated from the first gate electrode level conductive structure by the second distance as measured in the second direction.

14. The integrated circuit as recited in claim 13 , further comprising:

a first diffusion region of a first diffusion type, wherein the first portion of the local interconnect conductive structure physically contacts the first diffusion region of the first diffusion type.

15. The integrated circuit as recited in claim 14 , further comprising:

a first diffusion region of a second diffusion type, wherein the first portion of the local interconnect conductive structure physically contacts the first diffusion region of the second diffusion type.

16. The integrated circuit as recited in claim 15 , wherein a first portion of the first gate electrode level conductive structure and the first diffusion region of the first diffusion type form parts of a transistor of a first transistor type.

17. The integrated circuit as recited in claim 16 , wherein a second portion of the first gate electrode level conductive structure and the first diffusion region of the second diffusion type form parts of a transistor of a second transistor type.

18. The integrated circuit as recited in claim 17 , further comprising:

a second diffusion region of the first diffusion type forming part of the first transistor of the first transistor type; and

a second diffusion region of the second diffusion type forming part of the first transistor of the second transistor type.

19. The integrated circuit as recited in claim 18 , further comprising:

a first interconnect level conductive structure formed to physically connect with the contact conductive structure.

20. The integrated circuit as recited in claim 19 , wherein the first interconnect level conductive structure has a substantially rectangular shape with a length measured in the second direction and a width measured in the first direction.

21. The integrated circuit as recited in claim 20 , wherein the contact conductive structure formed to physically contact the second portion of the local interconnect conductive structure is a first contact conductive structure, the integrated circuit further comprising a second contact conductive structure formed to physically contact the first gate electrode level conductive structure.

22. The integrated circuit as recited in claim 21 , wherein the second contact conductive structure is positioned to contact the first gate electrode level conductive structure at a location in the first direction between the transistor of the first transistor type and the transistor of the second transistor type.

23. The integrated circuit as recited in claim 22 , further comprising:

a second interconnect level conductive structure formed to physically connect with the second contact conductive structure.

24. The integrated circuit as recited in claim 23 , wherein the second interconnect level conductive structure has a substantially rectangular shape with a length measured in the second direction and a width measured in the first direction.

25. The integrated circuit as recited in claim 24 , wherein the width of the second interconnect level conductive structure is substantially equal to the width of the first interconnect level conductive structure.

Assignments (4)
PATENT SECURITY AGREEMENT Recorded Aug 6, 2024
From: RPX CORPORATION; RPX CLEARINGHOUSE LLC
To: BARINGS FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 068328/0674 →
RELEASE OF LIEN ON PATENTS Recorded Aug 5, 2024
From: BARINGS FINANCE LLC
To: RPX CORPORATION
Reel/Frame 068328/0278 →
PATENT SECURITY AGREEMENT Recorded Apr 21, 2023
From: RPX CORPORATION
To: BARINGS FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 063424/0569 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2021
From: TELA INNOVATIONS, INC.
To: RPX CORPORATION
Reel/Frame 056602/0001 →
Continuity (7)
Continuation 14995110 · Jan 13, 2016
Continuation 14188321 · Feb 24, 2014
Continuation 13189433 · Jul 22, 2011
Continuation 12814411 · Jun 11, 2010
Division 11969854 · Jan 4, 2008
Provisional Application 60983091 · Oct 26, 2007
Related Publication 20180145075A1 · May 24, 2018
Cited By (3)
US 12,322,652 US 12,557,392 US 12,568,811