Mask for thin film deposition, method of manufacturing the same, and method of manufacturing a display apparatus using the same
A mask for thin film deposition of a display apparatus having both end portions coupleable to a frame in a state of tension in a lengthwise direction thereof, the mask including: a first portion having a first thickness and a plurality of pattern holes through which a deposition material may pass; a second portion comprising a welding portion having a second thickness configured to be coupled to a frame; and a third portion connecting the first portion and the third portion, wherein the first thickness is less than the second thickness, and the third portion includes an inclined surface connecting the first portion and the second portion.
1. A method of manufacturing a display apparatus from a mask for thin film deposition having both end portions coupled to a frame in a state of tension in a lengthwise direction thereof, the method comprising the steps of:
inserting a display substrate and a mask for thin film deposition into a chamber, the mask having a pattern portion in which a plurality of holes are formed, a welding portion coupled to the frame, and a connection portion having an inclined surface disposed between the pattern portion and the welding portion, the inclined surface being connected to an edge portion of the pattern portion without being connected to peripheries of the holes, the inclined surface being defined by an acute inclination angle, wherein the pattern portion has a thickness less than the thickness of the welding portion; and
forming a film using a deposition material on the display substrate by conducting the deposition material sprayed from a deposition source through the holes in the mask for thin film deposition,
wherein the pattern portion, the welding portion, and the connection portion comprise a first plating layer formed through a first electroforming step, and
the welding portion and the connection portion include a second plating layer formed through a second electroforming step distinct from the first electroforming step.
2. The method of claim 1 , wherein the acute inclination angle is greater than or equal to about 0.025° and less than or equal to about 10°.
3. The method of claim 2 , wherein the acute inclination angle is greater than or equal to about 0.045° and less than or equal to about 10°.
4. The method of claim 1 , wherein the second plating layer is formed on the first plating layer.
5. The method of claim 1 , wherein the inclined surface is formed on the second plating layer of the connection portion.
6. The method of claim 1 , wherein the plurality of holes are formed by etching part of the pattern portion by irradiating a laser beam onto the pattern portion.
7. The method of claim 1 , wherein the plurality of holes are formed by etching part of the pattern portion through wet etching.