Semiconductor structure and manufacturing method thereof
A semiconductor structure includes a semiconductor device, a first seal ring, a second seal ring, and a plurality of through semiconductor vias (TSV). The semiconductor device has a first surface and a second surface opposite to the first surface. The first seal ring is disposed on the first surface of the semiconductor device and is adjacent to edges of the first surface. The second seal ring is disposed on the second surface of the semiconductor device and is adjacent to edges of the second surface. The TSVs penetrate through the semiconductor device and physically connect the first seal ring and the second seal ring.
1. A semiconductor structure, comprising:
a semiconductor device having a first surface and a second surface opposite to the first surface;
a first seal ring, disposed on the first surface of the semiconductor device and adjacent to edges of the first surface;
a second seal ring, disposed on the second surface of the semiconductor device and adjacent to edges of the second surface; and
a plurality of through semiconductor vias (TSV) penetrating through the semiconductor device, wherein the plurality of TSVs physically connects the first seal ring and the second seal ring.
2. The semiconductor structure according to claim 1 , wherein the plurality of TSVs comprises polygonal columns, cylindrical columns, or elliptical columns.
3. The semiconductor structure according to claim 2 , wherein a width or a diameter of each TSV ranges between 1 μm and 100 μm, and a minimum distance between two adjacent TSVs ranges between 1 μm and 100 μm.
4. The semiconductor structure according to claim 1 , wherein the first seal ring and the second seal ring are respectively a single seal ring loop pattern.
5. The semiconductor structure according to claim 4 , wherein the plurality of TSVs physically connects the seal ring loop pattern of the first seal ring and the seal ring loop pattern of the second seal ring.
6. The semiconductor structure according to claim 1 , wherein the first seal ring and the second seal ring are respectively a multiple seal ring loop pattern, the multiple seal ring loop pattern comprises a first seal ring loop pattern and a second seal ring loop pattern surrounding the first seal ring loop pattern.
7. The semiconductor structure according to claim 6 , wherein a first portion of the plurality of TSVs physically connects the first seal ring loop pattern of the first seal ring and the first seal ring loop pattern of the second seal ring, and a second portion of the plurality of TSVs physically connects the second seal ring loop pattern of the first seal ring and the second seal ring loop pattern of the second seal ring.
8. The semiconductor structure according to claim 7 , wherein the first portion of the plurality of TSVs and the second portion of the plurality of the TSVs are arranged in a staggered manner.
9. The semiconductor structure according to claim 6 , wherein each of the plurality of TSVs is physically connected to the first seal ring loop pattern of the first seal ring, the second seal ring loop pattern of the first seal ring, the first seal ring loop pattern of the second seal ring, and the second seal ring loop pattern of the second seal ring.
10. A semiconductor structure, comprising:
a semiconductor device having a first surface and a second surface opposite to the first surface, wherein the semiconductor device comprises an active region and a peripheral region surrounding the active region;
a first interconnection layer, disposed on the first surface of the semiconductor device, wherein the first interconnection layer comprises a first seal ring located in the peripheral region;
a second interconnection layer, disposed on the second surface of the semiconductor device, wherein the second interconnection layer comprises a second seal ring located in the peripheral region; and
a plurality of through semiconductor vias (TSV) penetrating through the semiconductor device, wherein the plurality of TSVs physically connects the first seal ring and the second seal ring.
11. The semiconductor structure according to claim 10 , wherein the plurality of TSVs comprises polygonal columns, cylindrical columns, or elliptical columns.
12. The semiconductor structure according to claim 11 , wherein a width or a diameter of each TSV ranges between 1 μm and 100 μm, and a minimum distance between two adjacent TSVs ranges between 1 μm and 100 μm.
13. The semiconductor structure according to claim 10 , wherein the first seal ring and the second seal ring are respectively a single seal ring loop pattern.
14. The semiconductor structure according to claim 13 , wherein the plurality of TSVs physically connects the seal ring loop pattern of the first seal ring and the seal ring loop pattern of the second seal ring.
15. The semiconductor structure according to claim 10 , wherein the first seal ring and the second seal ring are respectively a multiple seal ring loop pattern, the multiple seal ring loop pattern comprises a first seal ring loop pattern and a second seal ring loop pattern surrounding the first seal ring loop pattern.
16. The semiconductor structure according to claim 15 , wherein a first portion of the plurality of TSVs physically connects the first seal ring loop pattern of the first seal ring and the first seal ring loop pattern of the second seal ring, and a second portion of the plurality of TSVs physically connects the second seal ring loop pattern of the first seal ring and the second seal ring loop pattern of the second seal ring.
17. The semiconductor structure according to claim 16 , wherein the first portion of the plurality of TSVs and the second portion of the plurality of the TSVs are arranged in a staggered manner.
18. The semiconductor structure according to claim 15 , wherein each of the plurality of TSVs is physically connected to the first seal ring loop pattern of the first seal ring, the second seal ring loop pattern of the first seal ring, the first seal ring loop pattern of the second seal ring, and the second seal ring loop pattern of the second seal ring.