Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.
1. An electro-optical device comprising:
a substrate;
a torsion hinge disposed above the substrate;
a flat plate disposed above the torsion hinge;
a supporting portion in which a resin is filled protrudes from the flat plate toward the torsion hinge; and
a reflective layer which completely covers a surface of the flat plate and the resin, the reflective layer contacting the resin,
wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the flat plate at a side opposite to the substrate is equal to 0.2 μm or less.
2. The electro-optical device according to claim 1 , wherein a surface of the resin at a side opposite to the substrate and a surface of the flat plate at a side opposite to the substrate form a continuous plane.
3. The electro-optical device according to claim 1 , wherein the resin has conductivity.
4. The electro-optical device according to claim 1 , wherein the resin is formed of a photosensitive resin.
5. An electronic apparatus comprising:
the electro-optical device according to claim 1 ; and
a light source unit which emits light source light to the reflective layer.
6. An electronic apparatus comprising:
the electro-optical device according to claim 2 ; and
a light source unit which emits light source light to the reflective layer.
7. An electronic apparatus comprising:
the electro-optical device according to claim 3 ; and
a light source unit which emits light source light to the reflective layer.
8. An electronic apparatus comprising:
the electro-optical device according to claim 4 ; and
a light source unit which emits light source light to the reflective layer.
9. The electro-optical device according to claim 1 , wherein the reflective layer directly contacts the resin.
10. The electro-optical device according to claim 1 , wherein the resin is formed of a photocurable resin.