Display device and method of manufacturing the same
A display device includes a common active pattern, a first gate electrode, and a second gate electrode. The common active pattern includes an NMOS area, a PMOS area, and a silicide area in a same layer as the NMOS area and the PMOS area. The silicide area electrically connects the NMOS area to the PMOS area. The NMOS area includes a first channel area and an n-doped area contacting the first channel area. The PMOS area includes a second channel area and a p-doped area contacting the second channel area. The first gate electrode overlaps the first channel area, and the second gate electrode overlaps the second channel area.
1. A display device, comprising:
a common active pattern including an NMOS area, a PMOS area and a silicide area in a same layer as the NMOS area and the PMOS area and electrically connecting the NMOS area to the PMOS area, the NMOS area including a first channel area and an n-doped area contacting the first channel area, the PMOS area including a second channel area and a p-doped area contacting the second channel area;
a first gate electrode overlapping the first channel area; and
a second gate electrode overlapping the second channel area.
2. The display device as claimed in claim 1 , wherein:
the n-doped area includes a first high-concentration n-doped area, a first low-concentration n-doped area, a second low-concentration n-doped area, and a second high-concentration n-doped area,
the p-doped area includes a first p-doped area and a second p-doped area, and
the silicide area contacts the first high-concentration n-doped area and the second p-doped area.
3. The display device as claimed in claim 1 , wherein the silicide area includes at least one of titanium silicide, nickel silicide, tantalum silicide, platinum silicide, cobalt silicide, and tungsten silicide.
4. The display device as claimed in claim 1 , wherein a thickness of the silicide area is greater than a thickness of the NMOS area or the PMOS area adjacent to the silicide area.
5. The display device as claimed in claim 1 , wherein a thickness of the silicide area is equal to a thickness of the NMOS area or the PMOS area adjacent to the silicide area.
6. The display device as claimed in claim 1 , further comprising:
an organic light-emitting diode to receive a driving current through the common active pattern.
7. The display device as claimed in claim 1 , wherein a width of the silicide area is equal to a width of the NMOS area or the PMOS area adjacent to the silicide area.
8. The display device as claimed in claim 1 , wherein a depth of a silicidized portion in the silicide area is about 10 Å to about 1,000 Å.
9. The display device as claimed in claim 1 , further comprising:
a first insulation layer covering the common active pattern,
wherein the first gate electrode and the second gate electrode are on the first insulation layer.
10. The display device as claimed in claim 9 , further comprising:
a second insulation layer covering the first gate electrode, the second gate electrode, and the first insulation layer; and
a silicide metal pattern passing through the first insulation layer and the second insulation layer to contact the silicide area.
11. The display device as claimed in claim 10 , further comprising:
a source electrode passing through the first insulation layer and the second insulation layer to contact the common active pattern; and
a drain electrode passing through the first insulation layer and the second insulation layer to contact the common active pattern, wherein the silicide metal pattern is in a same layer as the source electrode and the drain electrode.