Fingerprint sensor device and method

1. A semiconductor device comprising:

a fingerprint sensor;

through vias electrically connecting a first side of the fingerprint sensor with a conductive element located on a second side of the fingerprint sensor opposite the first side;

a high voltage chip in electrical connection with the through vias; and

a substrate in electrical connection with the through vias, wherein the high voltage chip is located within an opening of the substrate.

2. The semiconductor device of claim 1 , wherein the conductive element is a redistribution layer.

3. The semiconductor device of claim 1 , wherein the conductive element is a contact pad.

4. The semiconductor device of claim 1 , wherein the through vias are located through a semiconductor substrate.

5. The semiconductor device of claim 1 , wherein the through vias are located through an encapsulant and separated from the fingerprint sensor, the encapsulant in physical contact with the through vias.

6. The semiconductor device of claim 1 , wherein the substrate is a printed circuit board.

7. A semiconductor device comprising:

a sensor module;

a first metallization layer located adjacent the sensor module;

a second metallization layer located on an opposite side of the sensor module from the first metallization layer;

a through via connecting the first metallization layer with the second metallization layer, the through via having a height at least as large as the sensor module; and

a high voltage chip located on an opposite side of the second metallization layer from the sensor module.

8. The semiconductor device of claim 7 , wherein the second metallization layer comprises underbump metallizations.

9. The semiconductor device of claim 7 , further comprising an encapsulant encapsulating the sensor module and the through via.

10. The semiconductor device of claim 9 , wherein the encapsulant is planar with a contact pad of the sensor module.

11. The semiconductor device of claim 7 , further comprising a sensor surface material located on an opposite side of the sensor module from the high voltage chip.

12. The semiconductor device of claim 11 , further comprising an interface layer between the sensor surface material and the first metallization layer.

13. The semiconductor device of claim 7 , further comprising an interface layer adjacent to the first metallization layer.

14. The semiconductor device of claim 13 , wherein there is no sensor surface material over the interface layer.

15. A semiconductor device comprising:

a high voltage chip connected to a first redistribution layer;

a through via electrically connected to the first redistribution layer;

a sensor chip located adjacent to the through via; and

a second redistribution layer electrically connecting the sensor chip to the through via, wherein a line extends through the high voltage chip, the first redistribution layer, the sensor chip, and the second redistribution layer in that order.

16. The semiconductor device of claim 15 , further comprising an encapsulant in physical contact with the through via and extending from the through via to the sensor chip.

17. The semiconductor device of claim 16 , wherein the encapsulant has a surface that is planar with the sensor chip.

18. The semiconductor device of claim 15 , wherein the high voltage chip has a thickness of between about 70 μm and about 150 μm.

19. The semiconductor device of claim 15 , further comprising:

an interface material adjacent to the second redistribution layer; and

a sensor surface material adjacent to the interface material.

20. The semiconductor device of claim 15 , further comprising a color film layer adjacent to the second redistribution layer.