Superstrate and a method of using the same
A superstrate can include a body having a surface; a buffer layer overlying the surface; and a protective layer overlying the buffer layer, wherein the protective layer has a surface roughness that is equal to or less than a surface roughness of the surface of the body. The protective layer can include a material that can be selectively removed with respect to the buffer layer, and the buffer layer can include a material that can be selectively removed with respect to the body of the superstrate. The superstrate can be used for more planarization or other processing sequences before the body needs to be replaced, as any defects that may form extend into the protective layer or buffer layer and not reach the body. The layers can be removed and replaced by corresponding new layers without significantly adversely affecting the body.
1. A superstrate comprising:
a body having a surface;
a buffer layer overlying the surface; and
a protective layer overlying the buffer layer, wherein the protective layer has a surface that has a surface roughness that is no greater than a surface roughness of the surface of the body, wherein the surface roughness of the protective layer is less than 1 nm over a contact area of the superstrate, and
wherein the protective layer includes a material that can be selectively removed with respect to the buffer layer.
2. The superstrate of claim 1 , wherein the body has a transmittance of at least 70% for radiation used to cure a planarization precursor material.
3. The superstrate of claim 1 , wherein the protective layer includes a nitride, an oxynitride, or a transparent oxide.
4. The superstrate of claim 1 , wherein the buffer layer includes an organic compound.
5. The superstrate of claim 1 , wherein the buffer layer includes spin-on carbon, photoresist, a physically deposited carbon film, or a chemical vapor deposition.
6. The superstrate of claim 1 , wherein the buffer layer, the protective layer, or both are more permeable to a process gas, as compared to the body.
7. The superstrate of claim 6 , wherein the process gas is helium.
8. The superstrate of claim 1 , wherein the buffer layer or the protective layer comprises a deposited oxide, anodized alumina, an organo-silane, an organosilicate material, an organic polymer, inorganic polymers, and any combination thereof.
9. The superstrate of claim 1 , wherein the body includes soda lime glass, quartz, borosilicate glass, alkali-barium silicate glass, aluminosilicate glass, or synthetic fused silica.
10. A superstrate comprising:
a body having a surface;
a buffer layer overlying the surface; and
a protective layer overlying the buffer layer, wherein the protective layer has a surface that has a surface roughness that is no greater than a surface roughness of the surface of the body, wherein the protective layer includes a material that can be selectively removed with respect to the buffer layer, wherein the protective layer is treated with a release compound to facilitate release of the superstrate from a layer formed using the superstrate.
11. A superstrate for forming a planarization layer over a substrate, the superstrate comprising:
a body having a surface; and
a layer overlying the surface,
wherein the layer includes a material that is selectively etchable with respect to the body, and wherein the layer has a surface that has a surface roughness that is no greater than a surface roughness of the surface of the body, wherein the surface roughness of the layer is less than 1 nm over a contact area of the superstrate.
12. The superstrate of claim 11 , wherein a surface area of the superstrate is larger than a surface area of the substrate.