Systems and methods for sensory automated material handing
In an embodiment an automated material handling system (AMHS) for a semiconductor fabrication facility (FAB) includes: a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer; and a monitoring module configured to: detect a trigger event based on the sensor data, and initiate a remediation action in response to the trigger event.
1. An automated material handling system (AMHS) for a semiconductor fabrication facility (FAB), comprising:
a sensor supported by a rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the rail, wherein the sensor is mounted on a sensor extension structure supported by the stationary rail and the vehicle is configured to carry at least one wafer; and
a monitoring module configured to:
detect a trigger event based on the sensor data, and
initiate a remediation action in response to the trigger event.
2. The system of claim 1 , wherein the vehicle is configured to carry a wafer carrier that stores the at least one wafer.
3. The system of claim 1 , wherein the vehicle is movable on the rail via rolling movement.
4. The system of claim 1 , wherein the rail is stationary and the vehicle is suspended from the rail via a trolley.
5. The system of claim 1 , wherein the monitoring module is configured to:
determine the trigger event based on an analysis of historical sensor data, wherein the analysis is at least one of: an octave analysis, a spectrum analysis, a Fourier transform analysis, a joint time frequency analysis, an order analysis, an order tracking analysis, a bode plot analysis, a frequency response analysis, a vibration analysis, and a stress analysis.
6. The system of claim 5 , wherein the analysis determines the trigger event as a threshold value for the sensor data.
7. The system of claim 6 , wherein the threshold value is an outlier.
8. A system, comprising:
a sensor supported by a stationary rail, wherein the sensor is configured to collect sensor data characterizing a vehicle that moves along the stationary rail while suspended from the stationary rail via a trolley, wherein the vehicle is configured to carry at least one wafer while moving along the stationary rail via rolling movement; and
a monitoring module configured to:
determine a trigger event based on historical sensor data from the sensor,
detect the trigger event based on the sensor data, and
initiate a remediation action in response to the trigger event, wherein the trigger event is based on a noise, vibration, and harshness (NVH) study of the historical sensor data.
9. The system of claim 8 , wherein the sensor data is at least one of a transient response and steady-state response of at least one of noise and vibrations.
10. The system of claim 8 , wherein the sensor is located on an external surface of the stationary rail.
11. The system of claim 8 , wherein the sensor is mounted on a sensor extension structure supported by the stationary rail.
12. The system of claim 8 , wherein the stationary rail extends vertically within a vertical shaft.
13. A method, comprising:
collecting sensor data from a sensor supported by a rail, wherein the sensor data characterizes a vehicle that moves along the rail, wherein the vehicle is configured to carry at least one wafer while moving along the rail;
detecting a trigger event based on the sensor data; and
initiating a remediation action in response to the trigger event, wherein the trigger event is based on a noise, vibration, and harshness (NVH) study of the sensor data.
14. The method of claim 13 , comprising:
detecting another trigger event based on the sensor data; and
initiating a different remediation action in response to the another trigger event.
15. The method of claim 13 , further comprising:
determining the trigger event based on historical sensor data from the sensor.
16. The method of claim 15 , further comprising:
determining the trigger event by performing, based on the historical sensor data, at least one of: an octave analysis, a spectrum analysis, a Fourier transform analysis, a joint time frequency analysis, an order analysis, an order tracking analysis, a bode plot analysis, a frequency response analysis, a vibration analysis, and a stress analysis.
17. The method of claim 13 , wherein the trigger event is a sensor data value collected from the sensor that exceeds a threshold value.
18. The method of claim 17 , wherein the threshold value is an outlier.
19. The method of claim 13 , further comprising:
controlling the vehicle to move to a remediation area along the rail in response to the trigger event.
20. The method of claim 13 , further comprising:
collecting at least one of a transient response and steady-state response of at least one of noise and vibrations.