Pressure sensing element
Provided is a pressure sensing element including a first electrode, a pressure sensing unit on the first electrode, a second electrode disposed on the pressure sensing unit and having first and second points on a top surface thereof, a first elastic member on the second electrode, and a second elastic member on the first elastic electrode, wherein a thickness of the first elastic member decreases from the first point toward the second point, and a thickness of the second elastic member increases from the second point toward the first point.
1. A pressure sensing element comprising:
a first electrode, the first electrode including a first point located on a left side of the first electrode and a second point located on a right side of the first electrode;
a pressure sensing unit on the first electrode;
a second electrode disposed on the pressure sensing unit;
a first elastic member on the second electrode; and
a second elastic member on the first elastic electrode,
wherein a thickness of the first elastic member decreases along a direction from the first point toward the second point, and
a thickness of the second elastic member decreases along a direction from the second point toward the first point.
2. The pressure sensing element according to claim 1 , wherein an elastic coefficient of the first elastic member is greater than an elastic coefficient of the second elastic member.
3. The pressure sensing element according to claim 1 , wherein the first elastic member does not overlap the second point, and the second elastic member does not overlap the first point.
4. The pressure sensing element according to claim 1 , wherein the thickness of the first elastic member and the thickness of the second elastic member vary linearly.
5. The pressure sensing element according to claim 1 , wherein a sum of the thickness of the first elastic member and the thickness of the second elastic member is constant on the second electrode.
6. The pressure sensing element according to claim 1 , wherein the pressure sensing unit comprises a piezoelectric material or a piezoresistance material.
7. The pressure sensing element according to claim 1 , wherein the first elastic member and the second elastic member comprise an elastic rubber.
8. The pressure sensing element according to claim 1 , further comprising:
a protection layer disposed on the first elastic member and the second elastic member.