Method of manufacturing semiconductor device
In one embodiment, a method of manufacturing a semiconductor device includes forming a first film on a substrate. The method further includes forming a second film that contains carbon on the first film, and processing the second film into a second pattern. The method further includes impregnating a metal element or a semiconductor element into the second pattern after the processing into the second pattern. The method further includes processing the first film into a first pattern using the second pattern after the impregnation of the metal element or the semiconductor element.
1. A method of manufacturing a semiconductor device, comprising:
forming a first film on a substrate;
forming a second film that contains carbon on the first film;
forming a third film on the second film;
processing the third film into a third pattern;
processing the second film into a second pattern using the third pattern;
impregnating a metal element or a semiconductor element into the second pattern after the processing into the second pattern; and
processing the first film into a first pattern using the second pattern after the impregnation of the metal element or the semiconductor element.
2. The method of claim 1 , further comprising removing the third film after the processing into the second pattern,
wherein the metal element or the semiconductor element is impregnated into the second pattern after the removal of the third film.
3. The method of claim 1 , wherein the third film is formed by spin coating.
4. The method of claim 1 , wherein the processing into the third pattern comprises:
forming an antireflective coating on the third film, and
processing the third film into the third pattern after the antireflective coating is formed.
5. The method of claim 1 , wherein a minimum pitch of portions that form the second pattern is 500 nm or less.
6. The method of claim 1 , wherein the second film is a polymethyl methacrylate (PMMA) film.
7. The method of claim 1 , wherein the second film is formed by spin coating.
8. The method of claim 1 , wherein the first film includes a plurality of first insulating layers and a plurality of second insulating layers that are alternately formed on the substrate.
9. The method of claim 1 , wherein the impregnation of the metal element or the semiconductor element is performed in a vacuum vessel.
10. The method of claim 1 , wherein the impregnation of the metal element or the semiconductor element is performed using a gas that contains the metal element or the semiconductor element.
11. The method of claim 1 , wherein the metal element or the semiconductor element belongs to group 4 to group 14 of the periodic table of elements.
12. The method of claim 1 , wherein the metal element is titanium (Ti), hafnium (Hf), tungsten (W), tantalum (Ta), ruthenium (Ru) or zirconium (Zr).
13. The method of claim 1 , wherein the semiconductor element is silicon (Si) or germanium (Ge).
14. The method of claim 1 , wherein the metal element or the semiconductor element is impregnated such that a concentration of the metal element or the semiconductor element changes depending on a distance from an upper face of the second pattern and a distance from a lateral face of the second pattern.
15. The method of claim 1 , wherein the impregnation of the metal element or the semiconductor element comprises:
exposing the second pattern to a first gas containing a first component that includes the metal element or the semiconductor element, and
exposing the second pattern to a second gas containing a second component that reacts with the first component.
16. The method of claim 15 , wherein
the exposure to the first gas and the exposure to the second gas are performed in a vacuum vessel, and
the vacuum vessel is evacuated to a vacuum between the exposure to the first gas and the exposure to the second gas.
17. The method of claim 15 , wherein the impregnation of the metal element or the semiconductor element is performed to alternately repeat:
a plurality of first processes that expose the second pattern to the first gas, and
a plurality of second processes that expose the second pattern to the second gas.
18. The method of claim 15 , wherein the second component oxidizes the first component.
19. The method of claim 15 , wherein the second gas is water vapor.
20. A method of manufacturing a semiconductor device, comprising:
forming a first film on a substrate;
forming a second film that contains carbon on the first film;
processing the second film into a second pattern;
impregnating a metal element or a semiconductor element into the second pattern after the processing into the second pattern; and
processing the first film into a first pattern using the second pattern after the impregnation of the metal element or the semiconductor element,
wherein the impregnation of the metal element or the semiconductor element comprises:
exposing the second pattern to a first gas containing a first component that includes the metal element or the semiconductor element, and
exposing the second pattern to a second gas containing a second component that reacts with the first component.