Vertical wafer boat
View Patent ↗A vertical wafer boat includes a top plate, a bottom plate, three support posts, and wafer support parts. The support posts include a first and a second support posts arranged in right and left sides of a starting end side of a wafer inserting direction, and a third support post arranged in a center of a terminal end side of the wafer inserting direction. The wafer support parts include a first, second and third wafer support parts protruding in the horizontal direction from side surfaces of the first, second and third support posts, respectively. A total of horizontal sectional areas of the first wafer support part and the first support post, or the second wafer support part and the second support post, and a total of horizontal sectional areas of the third wafer support part and the third support post have a specific relationship.
1. A vertical wafer boat, to which a wafer is inserted in a wafer inserting direction, the vertical wafer boat comprising a top plate, a bottom plate, three support posts each having one end fixed to the top plate and the other end fixed to the bottom plate, and wafer support parts, wherein:
the support posts comprise a first and a second support posts arranged in right and left sides of a starting end side of the wafer inserting direction, and a third support post arranged in a center of a terminal end side of the wafer inserting direction;
the wafer support parts comprise a first, a second and a third wafer support parts protruding in the horizontal direction from side surfaces of the first, the second and the third support posts, respectively; and
when a total of horizontal sectional areas of the first wafer support part and the first support post and a total of horizontal sectional areas of the second wafer support part and the second support post are denoted by Sa, and a total of horizontal sectional areas of the third wafer support part and the third support post is denoted by Sb, an absolute value of a Ratio defined by the following expression is 1% or lower:
Ratio(%)=100×( Sa−Sb )/( Sa+Sb ).
2. The vertical wafer boat according to claim 1 , wherein:
the first wafer support part and the first support post form a bent leg shape in a horizontal section;
the second wafer support part and the second support post form a bent leg shape in a horizontal section; and
the third wafer support part and the third support post form a tapered shape in a horizontal section having a width increasing from an end of the third wafer support part toward a side of the third support post.
3. The vertical wafer boat according to claim 1 , wherein end parts of the first, the second and the third wafer support parts are arranged to be in positions of 65% or more and 75% or less of a radius of the wafer to be supported, from a center of the wafer.
4. The vertical wafer boat according to claim 2 , wherein end parts of the first, the second and the third wafer support parts are arranged to be in positions of 65% or more and 75% or less of a radius of the wafer to be supported, from a center of the wafer.