IP Library Granted Patent US 10,734,323
Granted Patent B2
US 10,734,323 · App. 15/900,808 · Granted Aug 4, 2020

Package structures

Inventors: Chun-Wen Lin (Changhua County, TW); Chung-Hao Tsai (Changhua County, TW); Chen-Hua Yu (Hsinchu, TW); Chuei-Tang Wang (Taichung, TW); Che-Wei Hsu (Kaohsiung, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L23/5389H01L21/486H01L21/4853H01L21/4857H01L21/565H01L23/3114H01L23/5383H01L23/5384H01L23/5386H01L23/66H01L24/19H01L24/20H01Q1/2283H01L2223/6677H01L2224/13101H01L2224/18H01L2224/214H01L2224/81801H01L2924/00014H01L2924/19106
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Quick Facts
Patent No.
US 10,734,323
App. No.
15/900,808
Granted
Aug 4, 2020
Kind
B2
Abstract

A package structure includes at least one integrated circuit component, an insulating encapsulation, and a redistribution structure. The at least one integrated circuit component includes a semiconductor substrate, an interconnection structure disposed on the semiconductor substrate, and signal terminals and power terminals located on and electrically connecting to the interconnection structure. The interconnection structure is located between the semiconductor substrate and the signal terminals and between the semiconductor substrate and the power terminals, and where a size of the signal terminals is less than a size of the power terminals. The insulating encapsulation encapsulates the at least one integrated circuit component. The redistribution structure is located on the insulating encapsulation and electrically connected to the at least one integrated circuit component.

Claims (49)

1. A package structure, comprising:

at least one integrated circuit component, comprising:

a semiconductor substrate;

an interconnection structure, disposed on the semiconductor substrate; and

signal terminals and power terminals, located on and electrically connecting to the interconnection structure, wherein a size of each of the signal terminals is less than a size of each of the power terminals;

an insulating encapsulation, only laterally encapsulating the at least one integrated circuit component; and

a redistribution structure, located on the at least one integrated circuit component and the insulating encapsulation and electrically connected to the at least one integrated circuit component.

2. The package structure of claim 1 , wherein each of the signal terminals comprises one signal via, and each of the power terminals comprises one power via.

3. The package structure of claim 1 , wherein each of the signal terminals comprises one signal via and one signal pad, and the signal pad is located between and electrically connected to the signal via and the interconnection structure, and wherein each of the power terminals comprises one power via and one power pad, and the power pad is located between and electrically connected to the power via and the interconnection structure.

4. The package structure of claim 1 , further comprising:

conductive elements, connecting to the redistribution structure, wherein the redistribution structure is located between the insulating encapsulation and the conductive elements; and

through vias, laterally encapsulated in the insulating encapsulation and located aside of a location of the at least one integrated circuit component, wherein the through vias are electrically connected to the at least one integrated circuit component.

5. The package structure of claim 1 , further comprising:

at least one additional integrated circuit component, disposed on the redistribution structure, wherein the at least one additional integrated circuit component is electrically connected to the at least one integrated circuit component through the redistribution structure.

6. A package structure, comprising:

at least one integrated circuit component, comprising:

a semiconductor substrate;

an interconnection structure, disposed on the semiconductor substrate;

signal terminals, located on and electrically connecting to the interconnection structure; and

power terminals, located on and electrically connecting to the interconnection structure, wherein a size of each of at least a portion of the power terminals is greater than a size of each of the signal terminals;

an insulating encapsulation, only laterally encapsulating the at least one integrated circuit component; and

a redistribution structure, located on the at least one integrated circuit component and the insulating encapsulation and electrically connected to the at least one integrated circuit component.

7. The package structure of claim 6 , wherein a size of each of other portion of the power terminals is substantially equal to the size of each of the signal terminals.

8. The package structure of claim 7 , wherein the size of each of the other portion of the power terminals is less than the size of each of the portion of the power terminals.

9. The package structure of claim 6 , wherein a size of each of other portion of the power terminals is greater than the size of each of the signal terminals.

10. The package structure of claim 9 , wherein the size of each of the other portion of the power terminals is less than or substantially equal to the size of each of the portion of the power terminals.

11. The package structure of claim 6 , wherein each of the signal terminals comprises one signal via, and each of the power terminals comprises one power via.

12. The package structure of claim 6 , wherein each of the signal terminals comprises one signal via and one signal pad, and the signal pad is located between and electrically connected to the signal via and the interconnection structure, and wherein each of the power terminals comprises one power via and one power pad, and the power pad is located between and electrically connected to the power via and the interconnection structure.

13. A package structure, comprising:

at least one integrated circuit component, comprising:

a semiconductor substrate;

an interconnection structure, disposed on the semiconductor substrate; and

signal connecting vias, ground connecting vias and at least one power connecting via, located on and electrically connecting to the interconnection structure, wherein a first size of each of the signal connecting vias is less than a second size of the at least one power connecting via;

an insulating encapsulation, only laterally encapsulating the at least one integrated circuit component; and

a redistribution structure, located on the at least one integrated circuit component and the insulating encapsulation and electrically connected to the at least one integrated circuit component.

14. The package structure of claim 13 , wherein the first size is less than a third size of each of the ground connecting vias, and the third size is less than or substantially equal to the second size.

15. The package structure of claim 13 , wherein the first size is substantially equal to a third size of each of the ground connecting vias, and the third size is less than the second size.

16. The package structure of claim 13 , wherein the at least one integrated circuit component further comprises:

signal contact pads, located between and physically connecting the interconnection structure and the signal connecting vias;

ground contact pads, located between and physically connecting the interconnection structure and the ground connecting vias; and

at least one power contact pad, located between and physically connecting the interconnection structure and the at least one power connecting via.

17. The package structure of claim 16 , wherein a size of each of the signal contact pads is less than a size of each of the ground contact pads and a size of the at least one power contact pad, and the size of each of the ground contact pads is less than or substantially equal to the size of the at least one power contact pad.

18. The package structure of claim 16 , wherein a size of each of the signal contact pads is less than a size of the at least one power contact pad and is substantially equal to a size of each of the ground contact pads, and the size of each of the ground contact pads is less than the size of the at least one power contact pad.

19. The package structure of claim 13 , further comprising:

conductive elements, connecting to the redistribution structure, wherein the redistribution structure is located between the insulating encapsulation and the conductive elements; and

through vias, laterally encapsulated in the insulating encapsulation and located aside of a location of the at least one integrated circuit component, wherein the through vias are electrically connected to the at least one integrated circuit component.

20. The package structure of claim 13 , further comprising:

at least one additional integrated circuit component, disposed on the redistribution structure and electrically connected to the at least one integrated circuit component through the redistribution structure,

wherein the redistribution structure is located between the at least one integrated circuit component and the at least one additional integrated circuit component.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 16, 2018
From: LIN, CHUN-WEN; TSAI, CHUNG-HAO; YU, CHEN-HUA; WANG, CHUEI-TANG; HSU, CHE-WEI
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 045544/0935 →
Continuity (2)
Provisional Application 62590257 · Nov 22, 2017
Related Publication 20190157208A1 · May 23, 2019
Cited By (1)
US 12,300,602