Template, template component, and semiconductor device manufacturing method
View Patent ↗According to an embodiment, a template includes a flat plate-shaped first member, a flat plate-shaped second member including a pattern arrangement face, and a flat plate-shaped third member provided with an opening at a position corresponding to an arrangement position of the second member. The template is dividable at a position of at least one of a first boundary between the first member and the second member and a second boundary between the first member and the third member.
1. A method for providing a template, the method comprising:
forming a flat plate-shaped pedestal member with a circular opening, a flat plate-shaped support member, and a flat plate-shaped pattern formation member including a pattern arrangement face;
disposing the pattern arrangement face at a position corresponding to the circular opening of the flat plate-shaped pedestal member;
setting mirror polishing surfaces in contact with each other to laminate the flat plate-shaped pedestal member and the flat plate-shaped support member so that the surfaces of the flat plate-shaped pedestal member and the flat plate-shaped support member facing a boundary have a surface roughness Root Mean Square (RMS) falling within a range of 0.005 nm to 0.30; and
setting mirror polishing surfaces in contact with each other to laminate the flat plate-shaped support member and the flat plate-shaped pattern formation member.
2. The method according to claim 1 , wherein the flat plate-shaped support member and the flat plate-shaped pattern formation member are laminated by setting mirror polishing surface in contact with each other such that the surfaces of the flat plate-shaped support member and the flat plate-shaped pattern formation members facing a boundary have a surface roughness Root Mean Square (RMS) falling within a range of 0.005 nm to 0.30 nm.
3. The method according to claim 1 , further comprising:
providing the flat plate-shaped support member and the flat plate-shaped pattern formation member with a first alignment mark used for positioning between the flat plate-shaped support member and the flat plate-shaped pattern formation member, and
providing the flat plate-shaped support member and the flat plate-shaped pedestal member with a second alignment mark used for positioning between the flat plate-shaped support member and the flat plate-shaped pedestal member.
4. The method according to claim 3 , further comprising:
forming the flat plate-shaped pedestal member to make a first size of the flat plate-shaped pedestal member in a direction parallel with the pattern arrangement face smaller than a second size of the flat plate-shaped support member and larger than a third size of the opening.
5. The method according to claim 1 , further comprising:
forming the flat plate-shaped pedestal member to have an outer shape same as that of the flat plate-shaped support member and make a first size of the flat plate-shaped pedestal member in a direction parallel with the pattern arrangement face same as a second size of the flat plate-shaped support member.
6. The method according to claim 1 , wherein the flat plate-shaped pedestal member, the flat plate-shaped support member, and the flat plate-shaped pattern formation member are made of quartz glass.
7. The method according to claim 1 , wherein the flat plate-shaped support member and the flat plate-shaped pattern formation member are made of a multi-component glass.
8. The method according to claim 7 , wherein the multi-component glass is glass in which oxide of one or more metals selected from a group including Ti, Al, and Nb is added to quartz glass.