Semiconductor memory device including phase change material layers and method for manufacturing thereof
A semiconductor memory device disposed over a substrate includes a common electrode, a selector material layer surrounding the common electrode, and a plurality of phase change material layers in contact with the selector material layer.
1. A semiconductor memory device disposed over a substrate, comprising:
a common electrode;
a selector material layer surrounding the common electrode; and
a plurality of phase change material layers in contact with the selector material layer, respectively,
wherein the selector material layer is disposed between the common electrode and the plurality of phase change material layers, and
the selector material layer includes one or more selected from the group consisting of AsGeSe doped with one or more selected from the group consisting of N, P, S, Si and Te; and AsGeSeSi doped with one or more selected from the group consisting of N, P, S, Si and Te.
2. The semiconductor memory device of claim 1 , wherein:
the common electrode has a columnar shape extending in a first direction perpendicular to a surface of the substrate, and
the plurality of phase change material layers are arranged in the first direction with one or more interlayer dielectric (ILD) layers interposed.
3. The semiconductor memory device of claim 2 , wherein each of the plurality of phase change material layers surrounds the selector material layer.
4. The semiconductor memory device of claim 3 , wherein each of the plurality of phase change material layers has a ring shape.
5. The semiconductor memory device of claim 1 , wherein the selector material layer includes a vertically extending portion that extends in the first direction is disposed on the common electrode and a plurality of flange portions that laterally extend in a second direction parallel to the surface of the substrate from the vertically extending portion and is in contact with the plurality of phase change material layers, respectively.
6. The semiconductor memory device of claim 1 , wherein the plurality of phase change memory layers includes one or more selected from the group consisting of Ge, Ga, Sn and In, and one or more selected from the group consisting of Sb and Te.
7. The semiconductor memory device of claim 6 , wherein the plurality of phase change memory layers further includes one or more selected from the group consisting of nitrogen, bismuth and silicon oxide.
8. A semiconductor memory device, comprising:
a field effect transistor (FET) disposed over a substrate and having a gate, a source and a drain;
a common electrode electrically connected to the drain of the FET;
a selector material layer surrounding the common electrode;
a plurality of phase change material layers in contact with the selector material layer, respectively; and
a plurality of upper electrodes electrically connected to the plurality of phase change material layers, respectively,
wherein the selector material layer is disposed between the common electrode and the plurality of phase change material layers, and
the selector material layer includes one or more selected from the group consisting of AsGeSe doped with one or more selected from the group consisting of N, P, S, Si and Te; and AsGeSeSi doped with one or more selected from the group consisting of N, P, S, Si and Te.
9. The semiconductor memory device of claim 8 , wherein the FET is a vertical FET comprising:
a semiconductor column vertically extending in a first direction perpendicular to a surface of the substrate and having the source, a channel disposed on the source and the drain disposed on the channel;
a gate dielectric layer surrounding the channel; and
the gate disposed over the gate dielectric layer and surrounding the channel.
10. The semiconductor memory device of claim 8 , wherein the FET is a fin FET.
11. The semiconductor memory device of claim 8 , wherein:
a plurality of upper electrodes electrically connected to the plurality of phase change material layers, respectively, via a plurality of conductive wires, and
each of the plurality of conductive wires includes a laterally extending portion that extends in a second direction parallel to a surface of the substrate and a vertically extending portion that extends in a first direction perpendicular to the surface of the substrate and is in contact with a corresponding one of the plurality of upper electrodes.
12. The semiconductor memory device of claim 11 , wherein the laterally extending portion surrounds a corresponding one of the plurality of phase change material layers.
13. The semiconductor memory device of claim 8 , wherein:
the common electrode has a columnar shape vertically extending in a first direction perpendicular to a surface of the substrate, and
the plurality of phase change material layers are vertically arranged in the first direction with one or more interlayer dielectric (ILD) layers interposed.
14. The semiconductor memory device of claim 13 , wherein each of the plurality of phase change material layers surrounds the selector material layer.
15. The semiconductor memory device of claim 14 , wherein each of the plurality of phase change material layers has a ring shape.
16. The semiconductor memory device of claim 8 , wherein the selector material layer includes a vertically extending portion that extends in a first direction perpendicular to a surface of the substrate and is disposed on the common electrode and a plurality of flange portions that laterally extend in a second direction parallel to the surface of the substrate from the vertically extending portion and is in contact with the plurality of phase change material layers, respectively.
17. A semiconductor memory device, comprising:
a plurality of memory elements, each of the plurality of memory elements including:
a field effect transistor (FET) having a gate, a source and a drain;
a common electrode electrically connected to the drain of the FET;
a selector material layer surrounding the common electrode;
a plurality of phase change material layers in contact with the selector material layer, respectively; and
a plurality of conductive wires connected to plurality of phase change material layers, respectively, wherein the selector material layer is disposed between the common electrode and the plurality of phase change material layers;
a first driver circuit and a second driver circuit configured to select one of the plurality of memory elements, and one of the plurality of upper electrodes of the selected one of the plurality of memory elements,
wherein the selector material layer includes one or more selected from the group consisting of AsGeSe doped with one or more selected from the group consisting of N, P, S, Si and Te; and AsGeSeSi doped with one or more selected from the group consisting of N, P, S, Si and Te.
18. The semiconductor memory device of claim 17 , wherein:
the plurality of memory elements include a first memory element and a second memory element, and
one of the plurality of conductive wires of the first memory element is electrically connected to one of the plurality of conductive wires located at a same level.
19. The semiconductor memory device of claim 17 , wherein the plurality of phase change material layers are vertically arranged with one or more interlayer dielectric (ILD) layers interposed.