Magneto-resistive effect element

1. A magneto-resistive effect element comprising:

a magnetization free layer that extends along a first plane;

an intermediate layer that extends along the first plane, and is stacked on the magnetization free layer; and

a magnetization pinned layer that extends along the first plane, and is provided on a side opposite to the magnetization free layer with the intermediate layer being interposed therebetween,

the magnetization free layer including;

a flat part that has a substantially constant first thickness, and an inclined part that includes an end surface, the inclined part having a second thickness that decreases as being away from the flat part, and

the magnetization free layer satisfying the following conditional expression (1):

L 2*( L 1) 2 ≥0.4 cubic micrometers (μm 3 )  (1)

where;

L 1 denotes a length in micrometers (μm) of the flat part of the magnetization free layer along the first plane, and

L 2 denotes a length in um of the inclined part of the magnetization free layer along the first plane.

2. The magneto-resistive effect element according to claim 1 , wherein:

the magnetization free layer further includes:

a first principal surface that extends along the first plane, and faces the intermediate layer, and

a second principal surface that extends along the first plane, and is positioned on a side opposite of the intermediate layer, and

the end surface includes a part that is positioned between a first position and a second position and is recessed from a position on a linear line that connects the first position and the second position on a second plane that is orthogonal to the first plane, the first position being a position at which the end surface and the first principal surface intersect each other, the second position being a position at which the end surface and the second principal surface intersect each other.

3. A magneto-resistive effect element comprising:

a magnetization free layer that extends along a first plane, and includes an end surface that has a maximum inclination angle of 42° or less relative to the first plane;

an intermediate layer that extends along the first plane, and is stacked on the magnetization free layer; and

a magnetization pinned layer that extends along the first plane, and is provided on a side opposite to the magnetization free layer with the intermediate layer being interposed therebetween,

wherein:

the magnetization free layer further includes:

a first principal surface that extends along the first plane, and faces the intermediate layer, and

a second principal surface that extends along the first plane, and is positioned on a side opposite of the intermediate layer, and

the end surface includes a part that is positioned between a first position and a second position and is recessed from a position on a linear line that connects the first position and the second position on a second plane that is orthogonal to the first plane, the first position being a position at which the end surface and the first principal surface intersect each other, the second position being a position at which the end surface and the second principal surface intersect each other.

4. The magneto-resistive effect element according to claim 3 , wherein the intermediate layer includes a first material that is non-magnetic and electrically conductive or a second material that is non-magnetic and non-electrically conductive.

5. The magneto-resistive effect element according to claim 3 , wherein the magnetization free layer has a thickness in a range from 6 nanometers (nm) to 13 nm in a thickness direction that is orthogonal to the first plane.

6. The magneto-resistive effect element according to claim 3 , wherein the magnetization free layer has a length of 6 μm or less in a direction of a detection target magnetic field along the first plane.

7. The magneto-resistive effect element according to claim 3 , wherein an area of the magnetization free layer along the first plane is a minimum at a position closest to the intermediate layer.

8. The magneto-resistive effect element according to claim 7 , wherein the area of the magnetization free layer along the first plane becomes smaller along a direction toward the intermediate layer.

9. A magneto-resistive effect element comprising:

a magnetization free layer that extends along a first plane, and includes an end surface that has a minimum inclination angle of 25° or less relative to the first plane;

an intermediate layer that extends along the first plane, and is stacked on the magnetization free layer; and

a magnetization pinned layer that extends along the first plane, and is provided on a side opposite to the magnetization free layer with the intermediate layer being interposed therebetween,

wherein:

the magnetization free layer further includes:

a first principal surface that extends along the first plane, and faces the intermediate layer, and

a second principal surface that extends along the first plane, and is positioned on a side opposite of the intermediate layer, and

the end surface includes a part that is positioned between a first position and a second position and is recessed from a position on a linear line that connects the first position and the second position on a second plane that is orthogonal to the first plane, the first position being a position at which the end surface and the first principal surface intersect each other, the second position being a position at which the end surface and the second principal surface intersect each other.