Vibrator device, oscillator, electronic device, and vehicle
A vibrator device includes a base, a vibrator that includes a vibrator element and a vibrator element package, which accommodates the vibrator element and has a first terminal on a surface on a base side, a circuit element that is disposed between the base and the vibrator and has a first connection pad on a surface on a vibrator side, and a conductive connecting member that is disposed between the circuit element and the vibrator, bonds the circuit element and the vibrator together, and electrically connects the first connection pad and the first terminal together.
1. A vibrator device comprising:
a base;
a vibrator that is disposed so as to overlap the base and includes a vibrator element and a vibrator element package, which accommodates the vibrator element and has a first terminal on a surface on a base side;
a circuit element that is disposed between the base and the vibrator and has a first connection pad on a surface on a vibrator side; and
a conductive connecting member that is disposed between the circuit element and the vibrator, bonds the circuit element and the vibrator together, and electrically connects the first connection pad and the first terminal together.
2. The vibrator device according to claim 1 ,
wherein the circuit element has
an active surface,
an insulating layer disposed on the active surface on the vibrator side, and
a wiring layer that is disposed on the insulating layer on the vibrator side and includes the first connection pad.
3. The vibrator device according to claim 1 ,
wherein the base has a second terminal, and
the circuit element has
a second connection pad on the surface on the vibrator side, and
a wire that electrically connects the second terminal and the second connection pad together.
4. The vibrator device according to claim 3 ,
wherein the second connection pad is disposed so as not to overlap the vibrator in plan view seen from a direction where the base, the circuit element, and the vibrator are arranged.
5. The vibrator device according to claim 3 ,
wherein a height of the wire from the base is lower than a height of the vibrator from the base.
6. The vibrator device according to claim 1 ,
wherein the vibrator element package has a base body having the first terminal and a lid bonded to the base body so as to form an accommodation space accommodating the vibrator element between the lid and the base body.
7. The vibrator device according to claim 1 ,
wherein the circuit element has a third connection pad that is disposed on the surface on the vibrator side and is electrically connected to the first connection pad, and
the third connection pad is disposed so as not to overlap the vibrator in plan view seen from a direction where the base, the circuit element, and the vibrator are arranged.
8. The vibrator device according to claim 1 , further comprising:
a mold portion that is disposed on the base and covers the vibrator and the circuit element.
9. The vibrator device according to claim 3 , further comprising:
a mold portion that is disposed on the base and covers the vibrator and the circuit element,
wherein the circuit element has a third connection pad that is disposed on the surface on the vibrator side and is electrically connected to the first connection pad,
the third connection pad is disposed so as not to overlap the vibrator in plan view seen from a direction where the base, the circuit element, and the vibrator are arranged, and
the third connection pad is closer to a center of the circuit element than the second connection pad is in the plan view.
10. An oscillator comprising the vibrator device according to claim 1 .
11. An electronic device comprising the vibrator device according to claim 1 .
12. A vehicle comprising the vibrator device according to claim 1 .