FinFET device having single diffusion break structure
View Patent ↗A semiconductor device includes: a fin-shaped structure on a substrate; a single diffusion break (SDB) structure in the fin-shaped structure to divide the fin-shaped structure into a first portion and a second portion; a gate structure on the first portion; and a contact etch stop layer (CESL) adjacent to the gate structure and extending to cover the SDB structure.
1. A semiconductor device, comprising:
a fin-shaped structure on a substrate;
a single diffusion break (SDB) structure in the fin-shaped structure to divide the fin-shaped structure into a first portion and a second portion;
a gate structure on the first portion; and
a contact etch stop layer (CESL) adjacent to the gate structure and extending to cover and directly contacting a top surface of the SDB structure.
2. The semiconductor device of claim 1 , further comprising:
a first spacer on sidewalls of the gate structure; and
a second spacer on sidewalls of the SDB structure, wherein the CESL is disposed on the first spacer and the second spacer.
3. The semiconductor device of claim 2 , further comprising a source/drain region in the substrate adjacent to two sides of the first spacer.
4. The semiconductor device of claim 2 , further comprising a source/drain region in the substrate adjacent to two sides of the second spacer.
5. The semiconductor device of claim 1 , wherein the fin-shaped structure is disposed extending along a first direction and the SDB structure is disposed extending along a second direction.
6. The semiconductor device of claim 5 , wherein the first direction is orthogonal to the second direction.