IP Library Granted Patent US 10,141,228
Granted Patent B1
US 10,141,228 · App. 15/917,859 · Granted Nov 27, 2018

FinFET device having single diffusion break structure

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Quick Facts
Patent No.
US 10,141,228
App. No.
15/917,859
Granted
Nov 27, 2018
Kind
B1
Abstract

A semiconductor device includes: a fin-shaped structure on a substrate; a single diffusion break (SDB) structure in the fin-shaped structure to divide the fin-shaped structure into a first portion and a second portion; a gate structure on the first portion; and a contact etch stop layer (CESL) adjacent to the gate structure and extending to cover the SDB structure.

Claims (12)

1. A semiconductor device, comprising:

a fin-shaped structure on a substrate;

a single diffusion break (SDB) structure in the fin-shaped structure to divide the fin-shaped structure into a first portion and a second portion;

a gate structure on the first portion; and

a contact etch stop layer (CESL) adjacent to the gate structure and extending to cover and directly contacting a top surface of the SDB structure.

2. The semiconductor device of claim 1 , further comprising:

a first spacer on sidewalls of the gate structure; and

a second spacer on sidewalls of the SDB structure, wherein the CESL is disposed on the first spacer and the second spacer.

3. The semiconductor device of claim 2 , further comprising a source/drain region in the substrate adjacent to two sides of the first spacer.

4. The semiconductor device of claim 2 , further comprising a source/drain region in the substrate adjacent to two sides of the second spacer.

5. The semiconductor device of claim 1 , wherein the fin-shaped structure is disposed extending along a first direction and the SDB structure is disposed extending along a second direction.

6. The semiconductor device of claim 5 , wherein the first direction is orthogonal to the second direction.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2021
From: UNITED MICROELECTRONICS CORPORATION
To: MARLIN SEMICONDUCTOR LIMITED
Reel/Frame 056991/0292 →