Magnetic bilayer structure for a cored or coreless semiconductor package
Techniques for fabricating a cored or coreless semiconductor package having one or more magnetic bilayer structures embedded therein are described. A magnetic bilayer structure includes a magnetic layer and a dielectric layer. For one technique, fabricating a cored or coreless semiconductor package includes: depositing a seed layer on a build-up layer; forming a raised pad structure and a trace on the seed layer; removing one or more uncovered portions of the seed layer to uncover top surfaces of one or more portions of the build-up layer; applying a magnetic bilayer structure on the raised pad structure, the trace, any unremoved portion of the seed layer, and the top surfaces of the one or more portions of the build-up layer, the magnetic bilayer structure comprises a magnetic layer and a dielectric layer; and forming a conductive structure on the raised pad structure. Other techniques are also described.
1. A semiconductor package, comprising:
a seed layer on a build-up layer;
a raised pad structure and a trace on the seed layer;
a magnetic bilayer structure on the raised pad structure and the trace, wherein the magnetic bilayer structure comprises a magnetic layer and a dielectric layer, the magnetic layer in direct contact with the raised pad structure and the trace, wherein a top surface of the magnetic layer is co-planar with a top surface of the raised pad structure;
a conductive via in an opening in the dielectric layer of the magnetic bilayer structure, the conductive via on a top surface of the raised pad structure; and
a conductive structure on the conductive via and on a portion of a top surface of the dielectric layer of the magnetic bilayer.
2. The semiconductor package of claim 1 , wherein the raised pad structure has a z-height that is larger than a z-height of the trace.
3. The semiconductor package of claim 1 , wherein the magnetic layer comprises one or more of:
a film comprising one or more magnetic fillers;
a paste comprising one or more magnetic fillers; and
an ink comprising one or more magnetic fillers.
4. The semiconductor package of claim 3 , wherein the dielectric layer is formed from a dielectric material lacking magnetic fillers.
5. The semiconductor package of claim 1 , further comprising:
a solder resist composition on a bottom surface of the build-up layer;
one or more openings formed in the solder resist composition and the build-up layer below the raised pad structure; and
a magnetic material in at least one of the one or more openings, wherein the magnetic material comprises one or more of: an ink comprising one or more magnetic fillers; and a paste comprising one or more magnetic fillers.
6. The semiconductor package of claim 1 , further comprising:
a solder resist composition encapsulating the conductive structure and uncovered top surfaces of the magnetic bilayer structure;
one or more openings formed in the solder resist composition above the raised pad structure; and
a magnetic material in at least one of the one or more openings, wherein the magnetic material comprises one or more of: an ink comprising one or more magnetic fillers; and a paste comprising one or more magnetic fillers.
7. A semiconductor package, comprising:
a seed layer on a build-up layer;
a raised pad structure and a trace on the seed layer;
a magnetic bilayer structure on the raised pad structure and the trace, wherein the magnetic bilayer structure comprises a prepackaged structure that comprises a dielectric film laminated on a magnetic film, the magnetic film in direct contact with the raised pad structure and the trace, wherein a top surface of the magnetic layer is co-planar with a top surface of the raised pad structure;
a conductive via in an opening in the dielectric layer of the magnetic bilayer structure, the conductive via on a top surface of the raised pad structure; and
a conductive structure on the conductive via and on a portion of a top surface of the dielectric layer of the magnetic bilayer.
8. The semiconductor package of claim 7 , wherein the raised pad structure has a z-height that is larger than a z-height of the trace.
9. The semiconductor package of claim 7 , wherein the magnetic layer comprises one or more of:
a film comprising one or more magnetic fillers;
a paste comprising one or more magnetic fillers; and
an ink comprising one or more magnetic fillers.
10. The semiconductor package of claim 9 , wherein the dielectric layer is formed from a dielectric material lacking magnetic fillers.
11. The semiconductor package of claim 7 , further comprising:
a solder resist composition on a bottom surface of the build-up layer;
one or more openings formed in the solder resist composition and the build-up layer below the raised pad structure; and
a magnetic material in at least one of the one or more openings, wherein the magnetic material comprises one or more of: an ink comprising one or more magnetic fillers; and a paste comprising one or more magnetic fillers.
12. The semiconductor package of claim 7 , further comprising:
a solder resist composition encapsulating the conductive structure and uncovered top surfaces of the magnetic bilayer structure;
one or more openings formed in the solder resist composition above the raised pad structure; and
a magnetic material in at least one of the one or more openings, wherein the magnetic material comprises one or more of: an ink comprising one or more magnetic fillers; and a paste comprising one or more magnetic fillers.
13. A semiconductor package, comprising:
a seed layer on a build-up layer;
a raised pad structure and a trace on the seed layer;
a magnetic bilayer structure on the raised pad structure and the trace, wherein the magnetic bilayer structure comprises a magnetic layer and a dielectric layer, the magnetic layer in direct contact with the raised pad structure and the trace;
a conductive structure on the raised pad structure over a via;
a solder resist composition on a bottom surface of the build-up layer;
one or more openings formed in the solder resist composition and the build-up layer below the raised pad structure; and
a magnetic material in at least one of the one or more openings, wherein the magnetic material comprises one or more of: an ink comprising one or more magnetic fillers; and a paste comprising one or more magnetic fillers.