IP Library › Granted Patent US 11,600,516
Granted Patent B2
US 11,600,516 · App. 15/930,533 · Granted Mar 7, 2023

Die ejector height adjustment

Inventors: Chi Wah Cheng (Hong Kong, HK); Wan Yin Yau (Hong Kong, HK); Kwok Pun Law (Hong Kong, HK)
Assignee: ASMPT SINGAPORE PTE. LTD.
H01L21/68742B65G49/061B65G49/067H01L21/67132H01L21/67259H01L21/681H01L21/6835B29C45/4005H01L2221/68322H01L2221/68381
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Quick Facts
Patent No.
US 11,600,516
App. No.
15/930,533
Granted
Mar 7, 2023
Kind
B2
Abstract

A die ejection apparatus operable to eject a die from a support has at least two ejector components configured to lift a die located on the support. The ejector components are moveable to a position in which a lifting force is exertable by the ejector components on the support, so as to lift a die located on the support. Movement of the die ejector components is initiated towards the support, and a moment when each of the die ejector components reaches the position is determined. A height offset of each die ejector component relative to a height of another die ejector component is determined upon reaching the said position, and relative heights of the die ejector components are adjusted in dependence upon the evaluated height offset.

Claims (40)

1. A method of adjusting a die ejection apparatus operable to eject a die from a support, the method comprising:

providing a die ejection apparatus comprising at least two ejector components configured to lift a die located on the support, the ejector components being moveable between:

a first position in which no lifting force is exertable by the ejector components on the support; and

a second position in which a lifting force is exertable by the ejector components on the support, so as to lift a die located on the support in use;

said method comprising:

providing a support over the die ejection apparatus;

initiating movement of the die ejector components from the first position towards the second position such that the die ejector components exert the lifting force on the support;

determining when each of the die ejector components reaches the second position from the first position;

evaluating a height offset of each die ejector component relative to a height of another die ejector component upon reaching the second position from the first position; and

adjusting relative heights of the die ejector components in dependence upon the evaluated height offset.

2. The method according to claim 1 , wherein adjusting the relative heights of the die ejector components in dependence upon the evaluated height offset comprises:

applying an alignment correction calculated from said evaluated height offset to substantially align the height of an operative surface of the ejector components before initiating any lifting of the die located on the support in use.

3. The method according to claim 1 , wherein adjusting the relative heights of the die ejector components in dependence upon the evaluated height offset comprises:

controlling the subsequent movement of the die ejector components such that the die ejector components reach the second position from the first position substantially simultaneously.

4. The method according to claim 1 , wherein the height of the operative surface of each of the die ejector components is independently adjustable.

5. The method according to claim 1 , wherein adjusting the relative heights of the die ejector components in dependence upon the evaluated height offset comprises:

manually adjusting a mount for the die ejector components to change a height of one or more of the die ejector components relative to another ejector component.

6. The method according to claim 1 , wherein adjusting the relative heights of the die ejector components in dependence upon the evaluated height offset comprises:

automatic adjustment of position of one or more of the die ejector components with motors coupled to the die ejector components.

7. The method according to claim 6 , wherein each of the die ejector components is coupled to a separate motor.

8. The method according to claim 1 , wherein the method further comprises:

after adjusting the relative heights of the die ejector components in dependence upon the evaluated height offset, initiating movement of the adjusted die ejector components from the first position to assess whether each of the die ejector components reaches the second position from the first position concurrently to determine a height offset therebetween; and thereafter,

repeating the determining, evaluating and adjusting steps if a height offset is detected.

9. The method according to claim 1 , wherein determining when each of the die ejector components reaches the second position comprises:

monitoring a deformation of the support caused by each die ejector component at the second position.

10. The method according to claim 1 , wherein monitoring comprises:

optically monitoring the imprint made by each die ejector component at the second position on a region of the support.

11. The method according to claim 10 , wherein monitoring comprises:

imaging a known region of the support prior to initiation of movement of any of the die ejector components from the first position to obtain an initial image;

initiating movement of the die ejector components from the first position towards the support;

imaging the known region of the support as the die ejector components move to the second position;

comparing the obtained image to the initial image and further comparing the respective imprints made by each of the die ejector components on the support for determining their relative heights.

12. The method according to claim 1 , wherein adjusting the relative heights of the die ejector components comprises:

controlling subsequent movement of the die ejector components from the first position to the second position relative to one another.

13. The method according to claim 12 , wherein controlling subsequent movement of the die ejector components comprises:

controlling a speed of movement of each independently controllable die ejector component between the first and second positions to account for the evaluated height offset such that the ejector components concurrently reach the second position.

14. The method according to claim 12 , wherein controlling subsequent movement of the die ejector components comprises:

controlling a time of initiation of movement of each independently controllable die ejector component between the first and second positions.

15. The method according to claim 12 , wherein controlling subsequent movement of the die ejector components comprises:

preventing movement of at least one independently controllable die ejector component until it is aligned with movement of the other die ejector components between the first and second positions to account for the evaluated height offset such that the ejector components concurrently reach the second position.

Assignments (2)
CHANGE OF NAME Recorded Aug 19, 2022
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 061264/0187 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 13, 2020
From: CHENG, CHI WAH; YAU, WAN YIN; LAW, KWOK PUN
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 052646/0381 →
Continuity (1)
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