Multiple section showerhead assembly
The invention discloses a showerhead assembly including a male board with a top surface and a bottom surface and having an injector extending from the bottom surface to inject a first gas; and a female board with a top surface and a bottom surface and having a cavity formed on the top surface. The cavity is communicatively coupled to a gas outlet through which a second gas is guided toward to the outlet. The cavity is configured to receive the first gas from the male board such that the first gas and the second gas mix and then is exhausted via the gas outlet.
1. A showerhead assembly having a gas outlet for supplying a mixed gas, the showerhead assembly comprising:
a male board having a top surface and a bottom surface, wherein the bottom surface of the male board has an injecting terminal formed thereon and the injecting terminal extends from the bottom surface of the male board to inject a first gas; and
a main board having a top surface and a bottom surface, wherein the top surface of the main board has a recess formed thereon without penetrating completely through the main board, the recess communicatively couples to the gas outlet to guide a second gas flowing from the top surface of the main board toward the gas outlet, the recess is configured to receive the first gas from the male board with the injecting terminal terminates above a bottom of the recess without contacting the main board such that the first gas and the second gas are mixed at the bottom of the recess and released via the gas outlet.
2. The showerhead assembly as claimed in claim 1 , wherein the male board has a flow channel defined between the top surface and the injecting terminal thereof in order to guide a first gas from the top surface of the male board to the injecting terminal of the male board.
3. The showerhead assembly as claimed in claim 2 , wherein the flow channel has a first segment and a second segment, the second segment is defined at the injecting terminal and has a diameter larger than that of the first segment.
4. The showerhead assembly as claimed in claim 1 , wherein the bottom surface of the male board and the top surface of the main board define a channel for the second gas, and the recess is a part of the channel.
5. The showerhead assembly as claimed in claim 3 , wherein the gas outlet has a diameter larger than that of the second segment of the flow channel.
6. The showerhead assembly as claimed in claim 1 , wherein the injecting terminal and a wall of the recess define a gap therebetween, the gap communicates with the channel for guiding the second gas, the flow channel for guiding the first gas and the gas outlet for guiding the mixed gas.
7. The showerhead assembly as claimed in claim 1 , wherein the gas outlet is located at the center of the showerhead assembly.
8. A showerhead assembly having a gas outlet for supplying a mixed gas, the showerhead assembly comprising:
a male board having a top surface and a bottom surface, wherein the bottom surface of the male board has an injecting terminal formed thereon, the injecting terminal extends from the bottom surface of the male board to inject a first gas; and
a main board having a top surface and a bottom surface with a recess formed on the top surface thereof, the recess without penetrating completely through the main board receiving a part of the injecting terminal that terminates above a bottom of the recess such that a wall defining the recess and the injecting terminal define a flow path for a second gas, whereby the first gas from the injecting terminal and the second gas are collected at the bottom of the recess and then flow to the gas outlet communicated with the recess.
9. The showerhead assembly as claimed in claim 8 , wherein the male board has a flow channel defined between the top surface and the injecting terminal thereof in order to guide the first gas entering from the top surface of the male board to the injecting terminal of the bottom surface of the male board.
10. The showerhead assembly as claimed in claim 8 , wherein the flow channel has a first segment and a second segment, the second segment is defined at the injecting terminal and has a diameter larger than that of the first segment.
11. The showerhead assembly as claimed in claim 8 , wherein the bottom surface of the male board and the top surface of the main board define a channel for the second gas, and the recess is a part of the channel.