Dishing prevention columns for bipolar junction transistors
In some embodiments, a bipolar junction transistor (BJT) is provided. The BJT may include a collector region that is disposed within a semiconductor substrate. A base region that is disposed within the semiconductor substrate and arranged within the collector region. An emitter region that is disposed within the semiconductor substrate and arranged within the base region. A pre-metal dielectric layer that is disposed over an upper surface of the semiconductor substrate and that separates the upper surface of the semiconductor substrate from a lowermost metal interconnect layer. A first plurality of dishing prevention columns that are arranged over the emitter region and within the pre-metal dielectric layer, where the plurality of dishing prevention columns each include a dummy gate that is conductive and electrically floating.
1. An integrated circuit (IC) comprising:
a first IC region comprising,
an emitter region disposed within a semiconductor substrate;
a ring-shaped base region disposed within the semiconductor substrate and laterally surrounding the emitter region;
a ring-shaped collector region disposed within the semiconductor substrate and laterally surrounding the ring-shaped base region;
a pre-metal dielectric layer disposed over an upper surface of the semiconductor substrate, and separating the upper surface of the semiconductor substrate from a lowermost metal interconnect layer; and
a plurality of dishing prevention columns arranged over the emitter region and within the pre-metal dielectric layer, wherein the plurality of dishing prevention columns each comprise a dummy gate that is conductive and electrically floating; a second IC region comprising,
a semiconductor device having a pair of source/drain regions disposed within the semiconductor substrate, wherein the source/drain regions are spaced apart; and
a gate stack disposed over the semiconductor substrate and arranged between the source/drain regions, wherein the gate stack comprises a first gate oxide layer separating a gate electrode from the semiconductor substrate, and wherein a sidewall spacer is disposed on sidewalls of the gate stack and sidewalls of each of the dishing prevention columns of the plurality of dishing prevention columns.
2. The IC of claim 1 , wherein each of the plurality of dishing prevention columns comprise a second gate oxide layer separating the dummy gate from the semiconductor substrate, and wherein the first gate oxide layer has a first height and the second gate oxide layer has a second height that is different than the first height.
3. The IC of claim 1 , wherein a top surface of the gate electrode has a first area and a top surface of the dummy gate has a second area that is different than the first area.
4. The IC of claim 1 , wherein the gate electrode comprises a first material and the dummy gate comprises a second material that is different than the first material.
5. The IC of claim 1 , wherein each of the plurality of dishing prevention columns comprise the first gate oxide layer separating the dummy gate from the semiconductor substrate.
6. The IC of claim 1 , wherein a top surface of the gate electrode has a first area and a top surface of the dummy gate has a second area that is substantially the same as the first area.
7. The IC of claim 1 , wherein the gate electrode comprises a first material and the dummy gate comprises the first material.
8. The IC of claim 7 , wherein the first material is a fully silicided material.
9. An integrated circuit (IC) comprising:
a collector region disposed within a semiconductor substrate;
a base region disposed within the semiconductor substrate and arranged within the collector region;
an emitter region disposed within the semiconductor substrate and arranged within the base region;
a dielectric layer disposed over an upper surface of the semiconductor substrate, and separating the upper surface of the semiconductor substrate from a lowermost metal interconnect layer; and
a first plurality of column structures arranged over the emitter region and within the dielectric layer, wherein the first plurality of column structures comprise a plurality of gate oxide layers, respectively.
10. The IC of claim 9 , further comprising:
a first isolation structure comprising a dielectric material disposed within the semiconductor substrate and arranged between the base region and the collector region; and
a second plurality of column structures arranged over the first isolation structure and within the dielectric layer, wherein the second plurality of column structures each comprise a dummy gate that is conductive and electrically floating.
11. The IC of claim 9 , further comprising:
a second isolation structure comprising a first dielectric material disposed within the semiconductor substrate and surrounding the collector region; and
a third plurality of column structures arranged over the second isolation structure and within the dielectric layer, wherein the third plurality of column structures each comprise a first dummy gate that is conductive and electrically floating.
12. The IC of claim 11 , further comprising:
a third isolation structure comprising a second dielectric material disposed within the semiconductor substrate and surrounding the second isolation structure; and
a fourth plurality of column structures arranged over the third isolation structure and within the dielectric layer, wherein the fourth plurality of column structures each comprise a second dummy gate that is conductive and electrically floating.
13. The IC of claim 9 , further comprising:
a ring-shaped structure disposed over the emitter region and surrounding the first plurality of column structures, wherein the ring-shaped structure is arranged within the dielectric layer.
14. The IC of claim 9 , wherein the first plurality of column structures comprise a plurality of dummy gates, respectively, each of the plurality of dummy gates being conductive and electrically floating.
15. The IC of claim 14 , wherein each of the plurality of gate oxide layers separate a corresponding one of the plurality of dummy gates from the upper surface of the semiconductor substrate.
16. The IC of claim 9 , further comprising:
a sidewall spacer arranged on sidewalls of each of the first plurality of column structures.
17. The IC of claim 15 , wherein the plurality of dummy gates comprise a fully silicided material.
18. An integrated circuit (IC) comprising:
a collector region disposed in a semiconductor substrate;
a base region disposed in the semiconductor substrate and arranged within the collector region;
an emitter region disposed in the semiconductor substrate and arranged within the base region;
a dielectric layer disposed over an upper surface of the semiconductor substrate;
a plurality of dishing prevention columns disposed over the emitter region and within the dielectric layer; and
a ring-shaped dishing prevention structure disposed over the emitter region and within the dielectric layer, wherein the ring-shaped dishing prevention structure surrounds the plurality of dishing prevention columns.
19. The IC of claim 18 , wherein:
the plurality of dishing prevention columns comprises a plurality of dummy gates, respectively; and
the ring-shaped dishing prevention structure comprises a ring-shaped gate, wherein the plurality of dummy gates and the ring-shaped gate comprise a same material.
20. The IC of claim 18 , wherein a sidewall spacer is disposed along sidewalls of each of the dishing prevention columns.