IP Library › Granted Patent US 10,686,031
Granted Patent B2
US 10,686,031 · App. 15/937,097 · Granted Jun 16, 2020

Finger metal-oxide-metal (FMOM) capacitor

Inventors: Peijie Feng (San Diego, CA); Junjing Bao (San Diego, CA); Ye Lu (San Diego, CA); Giridhar Nallapati (San Diego, CA)
Assignee: QUALCOMM Incorporated
H01L28/88H01L23/5223H01L23/5226
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Quick Facts
Patent No.
US 10,686,031
App. No.
15/937,097
Granted
Jun 16, 2020
Kind
B2
Abstract

A capacitor includes first conductive fingers interdigitated with second conductive fingers at an Mx interconnect level, and third conductive fingers interdigitated with fourth conductive fingers at an Mx-1 interconnect level. The third conductive fingers are offset from the first conductive fingers. The second conductive fingers are offset from the fourth conductive fingers. The capacitor further includes fifth conductive fingers interdigitated with sixth conductive fingers at an Mx-2 interconnect level. The fifth conductive fingers are offset from the third conductive fingers. The sixth conductive fingers are offset from the fourth conductive fingers. The capacitor further includes seventh conductive fingers interdigitated with eighth conductive fingers at an Mx-3 interconnect level. The seventh conductive fingers are offset from the fifth conductive fingers. The eighth conductive fingers are offset from the sixth conductive fingers. A first set of vias electrically couples the first conductive fingers to the fifth conductive fingers.

Claims (21)

1. A capacitor, comprising:

a first set of conductive fingers interdigitated with a second set of conductive fingers at an Mx interconnect level;

a third set of conductive fingers interdigitated with a fourth set of conductive fingers at an Mx-1 interconnect level, the third set of conductive fingers offset from and parallel to the first set of conductive fingers, the second set of conductive fingers offset from and parallel to the fourth set of conductive fingers;

a fifth set of conductive fingers interdigitated with a sixth set of conductive fingers at an Mx-2 interconnect level, the fifth set of conductive fingers offset from and parallel to the third set of conductive fingers, the sixth set of conductive fingers offset from and parallel to the fourth set of conductive fingers;

a seventh set of conductive fingers interdigitated with an eighth set of conductive fingers at an Mx-3 interconnect level, the seventh set of conductive fingers offset from and parallel to the fifth set of conductive fingers, the eighth set of conductive fingers offset from and parallel to the sixth set of conductive fingers; and

a first set of vias electrically coupling the first set of conductive fingers to the fifth set of conductive fingers, the first set of vias not coupled to any conductive fingers in interconnect level Mx-1.

2. The capacitor of claim 1 , in which the first set of vias are super-vias.

3. The capacitor of claim 1 , in which the conductive fingers are staggered.

4. The capacitor of claim 1 , in which a pitch between the conductive fingers varies within a same interconnect level.

5. The capacitor of claim 1 , further comprising a second set of vias electrically coupling the third set of conductive fingers to the seventh set of conductive fingers, the second set of vias not coupled to the fifth set of conductive fingers.

6. The capacitor of claim 5 , in which the first set of vias is offset from the second set of vias.

7. The capacitor of claim 5 , in which the first set of vias is aligned with the second set of vias.

8. The capacitor of claim 1 , integrated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.

9. A capacitor, comprising:

a first set of conductive fingers interdigitated with a second set of conductive fingers at an Mx interconnect level;

a third set of conductive fingers interdigitated with a fourth set of conductive fingers at an Mx-1 interconnect level, the third set of conductive fingers offset from and parallel to the first set of conductive fingers, the second set of conductive fingers offset from and parallel to the fourth set of conductive fingers;

a fifth set of conductive fingers interdigitated with a sixth set of conductive fingers at an Mx-2 interconnect level, the fifth set of conductive fingers offset from and parallel to the third set of conductive fingers, the sixth set of conductive fingers offset from and parallel to the fourth set of conductive fingers;

a seventh set of conductive fingers interdigitated with an eighth set of conductive fingers at an Mx-3 interconnect level, the seventh set of conductive fingers offset from and parallel to the fifth set of conductive fingers, the eighth set of conductive fingers offset from and parallel to the sixth set of conductive fingers; and

means for coupling the first set of conductive fingers to the fifth set of conductive fingers, the means for coupling not coupled to any conductive fingers in interconnect level Mx-1.

10. The capacitor of claim 9 , in which the conductive fingers are staggered.

11. The capacitor of claim 9 , integrated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 17, 2018
From: FENG, PEIJIE; BAO, JUNJING; LU, YE; NALLAPATI, GIRIDHAR
To: QUALCOMM INCORPORATED
Reel/Frame 045564/0299 →
Continuity (1)
Related Publication 20190305077A1 · Oct 3, 2019