Vacuum pump
A vacuum pump comprises: a base; a rotor shaft rotatably provided at the base; a rotor including rotor blades arranged in multiple stages and a rotor cylindrical portion, and attached to the rotor shaft; stationary blades each arranged between adjacent ones of the rotor blades, the stationary blades and the rotor blades forming a turbo exhaust portion; a stator forming, together with the rotor cylindrical portion, a screw groove exhaust portion; and a hexagon socket head cap screw configured to fix the stator to an upper surface of the base in a guiding path of the screw groove exhaust portion to which gas is guided from the turbo exhaust portion. The hexagon socket head cap screw is a bolt having a smaller height of a head portion than that of a hexagon socket head cap screw according to a provision of a country of use or an international organization.
1. A vacuum pump comprising:
a base;
a rotor shaft rotatably provided at the base;
a rotor
including rotor blades arranged in multiple stages and a rotor cylindrical portion, and
attached to the rotor shaft;
stationary blades each arranged between adjacent ones of the rotor blades, the stationary blades and the rotor blades forming a turbo exhaust portion;
a stator forming, together with the rotor cylindrical portion, a screw groove exhaust portion; and
a hexagon socket head cap screw configured to fix the stator to an upper surface of the base in a guiding path of the screw groove exhaust portion to which gas is guided from the turbo exhaust portion,
wherein an inner peripheral side inwardly-inclined surface, an inner peripheral side outwardly-inclined surface, and a flat surface arranged between the inner peripheral side inwardly-inclined surface and the inner peripheral side outwardly-inclined surface are formed at an upper surface of a flange of the stator,
the inner peripheral side inwardly-inclined surface and the inner peripheral side outwardly-inclined surface are formed with a downward slope toward the rotor shaft side,
the flat surface is annularly formed in a direction perpendicular to the rotor shaft,
a counterbore is provided at an upper surface of the flat surface of the stator,
at least part of a head portion of the hexagon socket head cap screw is arranged in the counterbore, and
an upper surface of the head portion of the hexagon socket head cap screw becomes substantially flush with the upper surface of the flat surface of the stator so that the head portion of the hexagon socket head cap screw does not interfere with a flow of gas, and product accumulation on the outer peripheral surface of the head portion of the hexagon socket head cap screw can be prevented.