Thermal infrared detector and manufacturing method thereof
An infrared sensor includes a supporting body having supporting body metal wiring that allows infrared rays to pass through. The supporting body is provided so as to cover one portion of an infrared detecting portion in a different plane spatially separated from that of the infrared detecting portion. The supporting body metal wiring disposed in an interior of the supporting body is such that one portion of a cobalt iron film is oxidized by a plasma discharge being carried out in an oxygen atmosphere. According to this kind of structure, infrared rays pass through the supporting body, and are absorbed by the infrared detecting portion, because of which there is no need to provide an infrared absorption layer in an upper layer of the supporting body.
1. A thermal infrared detector comprising, on a substrate, an infrared detecting portion having a temperature sensor that converts a temperature change caused by an incidence of infrared rays into an electrical signal, and a supporting body having a supporting body metal wiring that reads an electrical signal from the temperature sensor, wherein
the infrared detecting portion is held by the supporting body via a hollow portion between the infrared detecting portion and the substrate,
the supporting body is provided so as to cover one portion of the infrared detecting portion as seen from an infrared ray incident direction in a differing plane spatially separated from the infrared detecting portion, and a metal material that allows infrared rays to pass through is used for the supporting body metal wiring.
2. The thermal infrared detector according to claim 1 , wherein the supporting body metal wiring is an oxidized or nitrided metal film.
3. The thermal infrared detector according to claim 2 , wherein a portion of the supporting body metal wiring of a predetermined depth in a film thickness direction from a surface is oxidized or nitrided, and a portion that is not oxidized or nitrided is left.
4. The thermal infrared detector according to claim 3 , wherein the supporting body metal wiring is of cobalt iron.
5. The thermal infrared detector according to claim 3 , wherein the supporting body metal wiring is of titanium, aluminum, chromium, or an alloy including any one of these.
6. The thermal infrared detector according to claim 2 , wherein the supporting body metal wiring is of cobalt iron.
7. The thermal infrared detector according to claim 2 , wherein the supporting body metal wiring is of titanium, aluminum, chromium, or an alloy including any one of these.
8. The thermal infrared detector according to claim 2 , wherein the supporting body metal wiring is a layered film of two layers or more including a first supporting body metal wiring and a second supporting body metal wiring, and one portion of the layered film is oxidized or nitrided.
9. The thermal infrared detector according to claim 1 , wherein the temperature sensor is a multiple of diodes connected in series.
10. The thermal infrared detector according to claim 1 , wherein the substrate is such that a single crystal silicon layer is formed across an embedded silicon oxide film layer on a single crystal silicon substrate.
11. A method of manufacturing a thermal infrared detector such that an infrared detecting portion is held by a supporting body via a hollow portion between the infrared detecting portion and the substrate, the manufacturing method comprising:
a step of forming the infrared detecting portion having a temperature sensor that converts a temperature change caused by an incidence of infrared rays into an electrical signal on the substrate;
a step of forming a sacrificial layer that covers the infrared detecting portion and of which one portion is in contact with the substrate;
a step of partially removing the sacrificial layer, thereby exposing one portion of the temperature sensor;
a step of forming a supporting body metal wiring layer on the sacrificial layer so as to be electrically connected to the temperature sensor exposed in the sacrificial layer;
a step of modifying the supporting body metal wiring layer so that infrared rays pass through; and
a step of removing the sacrificial layer and one portion of the substrate, thereby forming the supporting body and the hollow portion.
12. The thermal infrared detector manufacturing method according to claim 11 , wherein a plasma discharge is carried out in an oxygen or a nitrogen atmosphere in the step of modifying the supporting body metal wiring layer so that infrared rays pass through, thereby oxidizing or nitriding one portion of the supporting body metal wiring layer.
13. The thermal infrared detector manufacturing method according to claim 12 , wherein a portion of the supporting body metal wiring layer of a predetermined depth in a film thickness direction from a surface is oxidized or nitrided, and a portion that is not oxidized or nitrided is left, in the step of modifying the supporting body metal wiring layer so that infrared rays pass through.
14. The thermal infrared detector manufacturing method according to claim 11 , wherein heat treatment is carried out in an oxygen or a nitrogen atmosphere in the step of modifying the supporting body metal wiring layer so that infrared rays pass through, thereby oxidizing or nitriding one portion of the supporting body metal wiring layer.
15. The thermal infrared detector manufacturing method according to claim 14 , wherein a portion of the supporting body metal wiring layer of a predetermined depth in a film thickness direction from a surface is oxidized or nitrided, and a portion that is not oxidized or nitrided is left, in the step of modifying the supporting body metal wiring layer so that infrared rays pass through.
16. The thermal infrared detector manufacturing method according to claim 11 , wherein cobalt iron is used as the supporting body metal wiring layer.
17. The thermal infrared detector manufacturing method according to claim 11 , wherein titanium, aluminum, chromium, or an alloy including any one of these, is used as the supporting body metal wiring layer.