Method for producing an optoelectronic semiconductor component and optoelectronic semiconductor component

1. A method for producing an optoelectronic semiconductor component, the method comprising:

providing at least two source substrates, wherein each of the source substrates is equipped with a specific type of radiation-emitting semiconductor chips;

providing a target substrate having a mounting plane for mounting the types of semiconductor chips;

transferring at least part of the types of semiconductor chips with a wafer-to-wafer process from the source substrates onto the target substrate so that the types of semiconductor chips maintain their relative position with respect to one another, so that each type of semiconductor chips arranged on the target substrate has a different height above the mounting plane; and

providing at least two casting layers,

wherein the semiconductor chips of at least one type are applied to at least one of the casting layers,

wherein each transfer of one specific type of semiconductor chips is followed by forming of one of the casting layers,

wherein the casting layer associated with one type of the semiconductor chips is located in the same plane with the respective type of semiconductor chips,

wherein the casting layers each substantially terminate flush with the associated type of semiconductor chips on a side of the associated chips facing away from the mounting plane, and

wherein the casting layers have the same thicknesses as the associated type of semiconductor chips, with a tolerance of at most 5 μm and of at most 25% of a mean height of the associated type of semiconductor chips.

2. The method according to claim 1 , wherein electrical lines for connecting the specific type of semiconductor chips are arranged on both main sides of the respective casting layer associated with this specific type of semiconductor chips.

3. The method according to claim 1 , wherein all casting layers are light-transmissive.

4. The method according to claim 1 , wherein the semiconductor chips do not overlap with one another as seen in plan view.

5. The method according to claim 1 , wherein at least one type of semiconductor chips is applied completely or partially to the casting layer which is uniquely assigned to the previously applied type of semiconductor chips.

6. The method according to claim 1 ,

wherein the semiconductor chips partially or completely overlap one another when viewed in a plan view, and

wherein light, which is generated in semiconductor chips lying closer to the mounting plane, in a finished display device is designed to be emitted at least partially through the semiconductor chips which are further away from the mounting plane.

7. The method according to claim 1 ,

wherein transferring the at least part of the types of semiconductor chips comprises transferring

at least 10 4 of the semiconductor chips are transferred per type, and

wherein precisely three types of semiconductor chips are transferred and one type of semiconductor chips is configured for emitting green light, one type is configured for emitting red light and one type is configured for emitting blue light, so that RGB pixels are formed.

8. The method according to claim 7 , wherein the semiconductor chips are arranged in the RGB pixels, when viewed in plan view, to terminate flush with one another at exactly one side edge, with a tolerance of at most 5 μm.

9. The method according to claim 1 ,

wherein the semiconductor chips are arranged in rows and within a specific row only semiconductor chips of the same type are arranged, and the rows follow one another with a periodicity of n,

wherein, viewed in cross-section, a staircase with n−1 steps is formed in each case by n consecutive rows,

wherein all staircases are identically oriented, and

wherein, viewed in a plan view, a distance between adjacent semiconductor chips within a specific staircase is smaller than a distance between adjacent staircases.

10. The method according to claim 1 ,

wherein transferring the at least part of the types of semiconductor chips comprises detaching, only a part of the originally present semiconductor chips from the associated source substrate, and

wherein at least one of the source substrates is a growth substrate for the associated semiconductor chips.

11. The method according to claim 1 , further comprising, after transferring the at least part of the types of semiconductor chips:

separating the target substrate into individual pixels; and

separating or cutting into at least one display device having a plurality of pixels.

12. The method according to claim 1 , wherein all of the casting layers with exception of a casting layer situated closest to the mounting plane are light-transmissive.

13. The method according to claim 1 , wherein the casting layer associated with one type of the semiconductor chips directly adjoins the respective type of semiconductor chips, and wherein each casting layer is arranged between adjacent semiconductor chips of the associated type of semiconductor chips.

14. A method for producing an optoelectronic semiconductor component, the method comprising:

providing at least two source substrates, wherein a first source substrate is equipped with a first type of radiation-emitting semiconductor chips and a second source substrate is equipped with a second type of radiation-emitting semiconductor chips;

providing a target substrate having a mounting plane for mounting the first and second types of semiconductor chips;

transferring at least part of the first type of semiconductor chips with a wafer-to-wafer process from the first source substrate onto the target substrate so that the first type of semiconductor chips maintain their relative position with respect to one another;

forming a first casting layer so that the first casting layer is located in the same plane with the first type of semiconductor chips, wherein the first casting layer has the same thicknesses as the first type of semiconductor chips with a tolerance of at most 5 μm and of at most 25% of a mean height of the first type of semiconductor chips;

after forming the first casting layer, transferring at least part of the second type of semiconductor chips with a wafer-to-wafer process from the second source substrate onto the target substrate so that the second type of semiconductor chips maintain their relative position with respect to one another; and

forming a second casting layer so that the second casting layer is located in the same plane with the second type of semiconductor chips, wherein the second casting layer has the same thicknesses as the second type of semiconductor chips with a tolerance of at most 5 μm and of at most 25% of a mean height of the second type of semiconductor chips;

wherein the first casting layer terminates flush with the first type of semiconductor chips on a side of the first type of semiconductor chips facing away from the mounting plane, and wherein the second casting layer terminates flush with the second type of semiconductor chips on a side of the second type of semiconductor chips facing away from the mounting plane.

15. The method according to claim 14 , further comprising:

forming first electrical lines for connecting the first type of semiconductor chips on both main sides of the first casting layer; and

forming second electrical lines for connecting the second type of semiconductor chips on both main sides of the second casting layer.

16. The method according to claim 14 , wherein the first and second casting layers are light-transmissive.

17. The method according to claim 14 , wherein the first and second types of semiconductor chips do not overlap with one another as seen in plan view.

18. The method according to claim 14 , wherein the first and second types of semiconductor chips are arranged in rows, and wherein a first row comprises only the first type of semiconductors and a second row comprises only the second type of semiconductor.