IP Library Granted Patent US 10,403,562
Granted Patent B2
US 10,403,562 · App. 15/943,200 · Granted Sep 3, 2019

Fan-out semiconductor package module

Inventors: Yong Ho Baek (Suwon-Si, KR); Joo Hwan Jung (Suwon-Si, KR); Yoo Rim Cha (Suwon-Si, KR); Young Sik Hur (Suwon-Si, KR); Jung Chul Gong (Suwon-Si, KR)
Assignee: SAMSUNG ELECTRONICS CO., LTD.
H01L23/481H01L23/49827H01L23/642H01L24/06H01L24/14H01L24/44H01L2224/02379H01L2924/15174H01L2924/182
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Quick Facts
Patent No.
US 10,403,562
App. No.
15/943,200
Granted
Sep 3, 2019
Kind
B2
Abstract

A fan-out semiconductor package module includes: a structure including a wiring member including wiring patterns, one or more first passive components disposed on the wiring member and electrically connected to the wiring pattern, and a first encapsulant encapsulating at least portions of each of the one or more first passive components, and having a first through-hole penetrating through the wiring member and the first encapsulant; a semiconductor chip disposed in the first through-hole of the structure and having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface; a second encapsulant encapsulating at least portions of the semiconductor chip and filling at least portions of the first through-hole; and a connection member disposed on the structure and the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads and the wiring patterns.

Claims (40)

1. A fan-out semiconductor package module comprising:

a structure including a wiring member including wiring patterns, one or more first passive components disposed on the wiring member and electrically connected to the wiring pattern, and a first encapsulant encapsulating at least portions of each of the one or more first passive components, and having a first through-hole penetrating through the wiring member and the first encapsulant;

a semiconductor chip disposed in the first through-hole of the structure and having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface;

a second encapsulant encapsulating at least portions of the semiconductor chip and filling at least portions of the first through-hole; and

a connection member disposed on the structure and the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads and the wiring patterns.

2. The fan-out semiconductor package module of claim 1 , wherein the one or more first passive components are electrically connected to the wiring patterns of the wiring member through low melting point metals.

3. The fan-out semiconductor package module of claim 2 , wherein the low melting point metal includes tin (Sn).

4. The fan-out semiconductor package module of claim 2 , wherein the wiring member includes an insulating layer, the wiring patterns embedded in the insulating layer and having lower surfaces thereof exposed by the insulating layer, and the low melting point metals disposed on the wiring patterns and at least partially covered with the insulating layer.

5. The fan-out semiconductor package module of claim 4 , wherein the redistribution layer is electrically connected to the wiring patterns and the connection pads through vias of the connection member in physical contact with the exposed lower surfaces of the wiring patterns and lower surfaces of the connection pads.

6. The fan-out semiconductor package module of claim 5 , wherein the vias of the connection member being in physical contact with the exposed lower surfaces of the wiring patterns have a thickness less than that of the vias of the connection member being in physical contact with the lower surfaces of the connection pads.

7. The fan-out semiconductor package module of claim 4 , wherein a lower surface of the insulating layer and a lower surface of a passivation layer of the semiconductor chip are disposed on approximately the same level.

8. The fan-out semiconductor package module of claim 1 , wherein the structure further includes a core member disposed on the wiring member and having the first through-hole and second through-holes spaced apart from the first through-hole,

the one or more first passive components are disposed in the second through-holes, and

the first encapsulant fills at least portions of the second through-holes.

9. The fan-out semiconductor package module of claim 8 , further comprising metal layers disposed on walls of the second through-holes.

10. The fan-out semiconductor package module of claim 9 , wherein the metal layers extend to upper and lower surfaces of the core member.

11. The fan-out semiconductor package module of claim 10 , further comprising:

a backside metal layer disposed on at least one of the first encapsulant and the second encapsulant; and

backside vias penetrating through at least portions of at least one of the first encapsulant and the second encapsulant and connecting the metal layers and the backside metal layer to each other.

12. The fan-out semiconductor package module of claim 8 , wherein the core member further has a third through-hole spaced apart from the first and second through-holes,

the structure further includes one or more second passive components disposed in the third through-hole on the wiring member, and

the first encapsulant encapsulates at least portions of the second passive components, and fills at least portions of the third through-hole.

13. The fan-out semiconductor package module of claim 8 , further comprising a circuit member disposed between the wiring member, and the semiconductor chip and the connection member and electrically connecting connection pads and the wiring patterns to the redistribution layer.

14. The fan-out semiconductor package module of claim 8 , wherein the core member includes a first insulating layer, a first wiring layer embedded in the first insulating layer so that one surface thereof is exposed, a second wiring layer disposed on the other surface of the first insulating layer opposing one surface of the first insulating layer in which the first wiring layer is embedded, a second insulating layer disposed on the first insulating layer and covering the second wiring layer, and a third wiring layer disposed on the second insulating layer, and

the first to third wiring layers are electrically connected to the wiring patterns.

15. The fan-out semiconductor package module of claim 8 , wherein the core member includes a first insulating layer, a first wiring layer and a second wiring layer disposed on opposite surfaces of the first insulating layer, respectively, a second insulating layer disposed on the first insulating layer and covering the first wiring layer, a third wiring layer disposed on the second insulating layer, a third insulating layer disposed on the first insulating layer and covering the second wiring layer, and a fourth wiring layer disposed on the third insulating layer, and

the first to fourth wiring layers are electrically connected to the wiring patterns.

16. The fan-out semiconductor package module of claim 1 , wherein the second encapsulant covers an upper surface of the first encapsulant.

17. The fan-out semiconductor package module of claim 1 , wherein upper surfaces of the first and second encapsulants are disposed on the approximately same level.

18. The fan-out semiconductor package module of claim 1 , wherein the semiconductor chip includes a power management integrated circuit (PMIC), and

the one or more first passive components include capacitors.

19. The fan-out semiconductor package module of claim 1 , wherein walls of the first through-hole are in physical contact with the second encapsulant.

20. A fan-out semiconductor package module comprising:

a support member including an insulating layer, a conductive layer disposed on the insulating layer, and first and second vias penetrating through the insulating layers and electrically connected to the conductive layers;

a passive component and a semiconductor chip disposed on the support member;

a first encapsulant encapsulating at least a portion of the passive component, and having a through-hole penetrating through the first encapsulant; and

a second encapsulant encapsulating at least a portion of the semiconductor chip and filling at least a portion of the through-hole,

wherein the semiconductor chip is disposed in the through-hole of the first encapsulant and has an active surface having connection pads disposed thereon and an inactive surface opposing the active surface,

the passive component is electrically connected to the first vias of the support member at least through solder bumps disposed between the first vias of the support member and the passive component, and

the connection pads of the semiconductor chip are in direct contact with the second vias of the support member.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2019
From: SAMSUNG ELECTRO-MECHANICS CO., LTD.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 049350/0756 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 2, 2018
From: BAEK, YONG HO; JUNG, JOO HWAN; CHA, YOO RIM; HUR, YOUNG SIK; GONG, JUNG CHUL
To: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Reel/Frame 045816/0388 →
Priority Claims (1)
KR 10-2017-0143840 · Oct 31, 2017 · national
Continuity (1)
Related Publication 20190131212A1 · May 2, 2019