Heat exchanger and electronic device handling apparatus including the same
View Patent ↗A heat exchanger which exchanges heat with a DUT while contacting the DUT includes: a heat exchange block which thermally contacts the DUT; a first heat transfer sheet which overlaps a front end surface of the heat exchange block; a second heat transfer sheet which overlaps the front end surface of the heat exchange block through the first heat transfer sheet; and a first holding member which holds the second heat transfer sheet.
1. A heat exchanger which exchanges heat with a Device Under Test (DUT) while contacting the DUT, comprising:
a heat exchange block which thermally contacts the DUT;
a first heat transfer sheet which overlaps a front end surface of the heat exchange block;
a second heat transfer sheet which overlaps the front end surface of the heat exchange block through the first heat transfer sheet; and
a suction holding mechanism which sucks and holds the second heat transfer sheet, wherein the suction holding mechanism includes:
a flow passage communicating with a space formed between the heat exchange block and the second heat transfer sheet; and
a pressure reduction device connected to the flow passage and depressurizing the space through the flow passage.
2. The heat exchanger according to claim 1 , wherein the first heat transfer sheet includes:
fibrous heat transfer members which are oriented in a thickness direction of the first heat transfer sheet; and
an elastomer or rubber which holds the heat transfer members.
3. The heat exchanger according to claim 1 , wherein the second heat transfer sheet is a metal foil formed of copper, aluminum, or an alloy thereof.
4. An electronic device handling apparatus comprising:
a transfer arm which holds a DUT and presses the DUT against a socket;
the heat exchanger according to claim 1 ; and
a temperature adjustment device which heats and/or cools the heat exchange block of the heat exchanger, wherein
the heat exchange block is provided in the transfer arm.